Probing device and system for testing an integrated circuit

A system for testing an integrated circuit, comprising:

• a minute robe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• means for moving the moving member relatively to the sample;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample;
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• and
• means for controlling a height of the probe relative to the sample to be constantly maintained when the probe is moved relatively to the sample in a horizontal direction.

A system for testing an integrated circuit, comprising:

• a probing device including a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, a moving means for moving the moving member relatively to the sample, a transducing means for generating information of voltage or current by means of light, a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe, a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• a monitor means for observing a portion near a wiring to be measured in the integrated circuit;
• a stage means provided movably relative to the integrated circuit which is the sample, for mounting the probing device and the monitor means thereon;
• and
• means for controlling the moving means and the stage means.

A system for testing an integrated circuit, comprising:

• a probing device including a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, means for moving the moving member relatively to the sample, a transducing means for generating information of voltage or current by means of light, a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe, a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• a monitor means for observing a portion near a wiring to be measured in the integrated circuit;
• and
• a stage means provided movably relative to the integrated circuit, for mounting the probing device and the monitor means thereon,
• the stage means including an opening portion for enabling the observation by the monitor means and the probing by the probing device, and at least one of a stage for mounting the monitor means and a stage for mounting the probing device.

A system for testing an integrated circuit comprising:

• a probing device including a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, means for moving the moving member relatively to the sample, a transducing means for generating information of voltage or current by means of light, a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe, a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• a stage means serving as a first coarse-moving means provided to surround the integrated circuit, on a frame fixed to a station part of a testing apparatus for driving the integrated circuit which is the sample and effecting an external test of the integrated circuit;
• a turning stage provided in the center of a moving table of the stage means, for mounting the probing device thereon;
• and
• a monitor means having a second coarse-moving means, for observing the integrated circuit.

A system for testing an integrated circuit, comprising:

• a probing device including a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, means for moving the moving member relatively to the sample, a transducing means for generating information of voltage or current by means of light, a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe, a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• a coarse-moving stage provided on a frame having a vibration-removing means for removing vibration from a floor;
• an integrated circuit mounting base provided fixedly on the coarse-moving stage, mounting the integrated circuit thereon and provided with means for feeding a drive signal to the integrated circuit;
• a probing frame provided to surround the integrated circuit mounting base and the coarse-moving stage on the frame having the vibration-removing means;
• a turning stage provided in the center of a table of the probing frame, for mounting the probing device thereon;
• a monitor means provided with means movable in a Z direction, for observing the integrated circuit;
• and
• a frame for mounting the monitor means thereon, provided to surround the probing frame and separately from the probing frame.

A system for testing an integrated circuit, comprising:

• a probing device including a minute probe in which at least an end portion is formed by conductive material, a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z, means for moving the moving member relatively to the sample, a transducing means for generating information of voltage or current by means of light, a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe, a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample, and a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point, wherein
• the detecting means includes a first optical system and the voltage measuring means includes a second optical system, the first and second optical systems being arranged such that respective optical paths of laser beams are present within a predetermined range of height above the position of the minute probe attached to the one end of the cantilever.

A system for testing an integrated circuit, comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• means for moving the moving member relatively to the sample;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample;
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• means for searching a detailed position of the measurement point on the sample;
• and
• means for ensuring an electric connection between the measurement point on the sample and the minute probe.

A system for testing an integrated circuit, comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample;
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point;
• means for determining a relationship between an output of the transducing means obtained when a known voltage is applied to an electrode connected to the probe, and the known voltage;
• and
• means for converting the output of the transducing means into a corresponding voltage value by means of the determined relationship.

A probing device comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample;
• and
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point, wherein
• a first substrate including the moving member and the transducing means is provided with a second substrate for light transmission thereon, and the entire probing device is held by holding the second substrate.

A probing device comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• a detecting means for detecting a change in a physical amount occurring in the cantilever by a force caused between the probe and the sample by a relative proximity of the moving member to the sample;
• and
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on an output of the detecting means, by way of the transducing means when the probe is contacted with the measurement point, wherein
• a portion of the cantilever is bent such that it has a convex form relatively to a surface of the sample, the another end of the cantilever being fixed to a probing substrate constituting part of the moving member, and respective bottom surfaces of the cantilever and the probing substrate are greatly inclined with respect to the surface of the sample such that the probe is applied substantially perpendicularly to the surface of the sample.

A system for testing an integrated circuit, comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• means for measuring a displacement caused in the cantilever by a relative proximity of the moving member to the sample, by means of light;
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on the measured displacement, by way of the transducing means when the probe is contacted with the measurement point;
• and
• a monitor means for observing the surface of the sample, wherein
• the cantilever has such a characteristic that it transmits therethrough most of or all of the observation light in the monitor means and reflects thereon part of or all of the laser light for displacement measurement.

A system for testing an integrated circuit, comprising:

• a minute probe in which at least an end portion is formed by conductive material;
• a cantilever having one end to which the probe is attached, and another end fixed to a moving member movable relatively to a sample in each direction of X, Y and Z;
• a transducing means for generating information of voltage or current by means of light;
• a connecting means having a low electric resistance, for connecting the transducing means and the end portion of the probe;
• means for measuring a displacement caused in the cantilever by a relative proximity of the moving member to the sample, by means of light;
• a voltage measuring means for measuring a voltage at a measurement point on the sample, which is determined based on the measured displacement, by way of the transducing means when the probe is contacted with the measurement point;
• and
• means for determining a wear amount of the probe by utilizing a change in a control voltage of a fine-moving mechanism required for applying a constant very small displacement to the cantilever.