Microdynamic devices fabricated on silicon-on-sapphire substrates
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorDouglas A. Sexton
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Abstract
Silicon-on-sapphire substrates are provided for the fabrication of micromechanical devices, such as micromotors. The high voltage stand-off characteristics of silicon-on-sapphire thereby provides for the construction of superior electrostatically driven devices and sensors capable of being driven at significantly higher applied potentials since silicon-on-sapphire has demonstrated a capability for building in the range of hundreds of Angstroms, or thick, in the range of microns very high speed, low power, very densely packed integrated circuits using standard silicon processing techniques. As a consequence, the electrostatically driven devices, micromotors, can be incorporated in the integrated circuits and yet be powered at elevated voltages to increase their work potential.
Claims7
An improved micromotor capable of being driven at increased driving potentials comprising:
- a silicon-on-sapphire substrate;
- and
- micromotor constituents fabricated on said silicon-on-sapphire substrate to assure said being driven at increased driving potentials.
A method of fabricated an improved micromotor to provide a capability for being driven at higher potentials that silicon substrate components comprising:
- providing a silicon-on-sapphire substrate;
- and
- fabricating the constituents of a micromotor on said silicon-on-sapphire substrate.
Dependencies are inferred from the claim text.