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US 5,330,968 AGranted
Laser ablation process for preparing oxide superconducting thin films
AssigneeSumitomo Electric Industries, Ltd.
InventorsTatsuoki Nagaishi, Nobuhiro Ota, Naoji Fujimori
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Abstract
A laser ablation process for preparing an oxide superconducting thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage of 75-100 V is applied between the electrode and the target.
Claims10
In a laser ablation process for preparing a compound copper-oxide superconductor film on a substrate, the improvement comprising arranging an electrode between a substrate and a target, wherein said electrode is of a shape selected from the group consisting of:
- a planar shape which extends across an area between the substrate and the target and a cylindrical shape;
- and
- applying a bias voltage having a potential which is 75 to 100 volts higher than a potential of said target between the electrode and the target while the film is formed by the laser ablation.
Dependencies are inferred from the claim text.