Multilayer Ti-Al-N coating for tools
AssigneeLeybold Aktiengesellschaft
InventorsDieter Hofmann, Bernd Hensel
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Abstract
Surface coating includes alternating first and second ternary layers, wherein the first layer TiAlN.sub.x has a higher nitrogen content and is considerably thinner than the second layer TiAlNy. The first layer is preferably applied by decreasing the nitrogen content of a reactive atmosphere from a maximum to a minimum during sputtering of a TiAl target. The second layer is then applied by sputtering the TiAl target over a longer period of time while the nitrogen content is maintained constant at the minimum. When a further first layer is applied, the nitrogen is again increased to the maximum.
Claims16
A hard multilayer surface coating for a substrate comprising
- a plurality of first layers wherein each first layer consists of at least one element from a first group consisting of Ti, Zr, Hf, and V, at least one element from a second group consisting of Al and Si, and at least one element from a third group consisting of N and C, the content of Said at least one element from said third group varying from a maximum to a minimum through the thickness of each first layer, and
- a plurality of second layers alternating with said first layers, each said second layer consisting of at least one element from each of said first, second, and third groups, the relative proportion of said at least one element from said third group being less in said second layer than in said first layer.
Dependencies are inferred from the claim text.