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US 5,330,842 AGranted
Surface treated vestibule block and process of making the same
AssigneesDavid M. Volz, David L. Thompson
InventorDavid L. Thompson
Life of this patent
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AssigneesDavid M. Volz, David L. Thompson
InventorDavid L. Thompson
Estimating the term…
A vestibule block or interior furnace wall utilized in a diffusion furnace for manufacturing semi-conductors, integrated circuits and the like, and which is made of refractory or ceramic material, is treated on its surface with a suspension of fine particulate of a glass frit composition comprising an alkali earth metal alumino silicate, and is thereafter heated above the transition temperature of the alkali earth metal alumino silicate. Vestibule blocks and interior surface walls which have been treated in the above-described manner are highly abrasion resistant on their surface, generate virtually no particulate matter under conditions of ordinary use in the semi-conductor manufacturing processes, and generate significantly less particulate matter when tested in an abrasion test against vestibule blocks of the prior art.
A vestibule block to be utilized in a furnace for making semi-conductors and integrated circuits and, the vestibule block comprising ceramic material and having a abrasion resistant outer surface comprising an alkali earth metal alumino silicate which has been heated above its transition point.
An interior wall in a furnace for making semi-conductors and integrated circuits and the interior wall comprising ceramic material and having a abrasion resistant outer surface comprising an alkali earth metal alumina silicate which has been heated above its transition point.
A vestibule block to be utilized in a furnace for making semi-conductors and integrated circuits and the vestibule block comprising ceramic material and having a abrasion resistant outer surface which has been prepared by the process comprising the steps of:
An interior wall to be utilized in a furnace for making semi-conductors and integrated circuits and the interior wall comprising ceramic material and having a abrasion resistant outer surface which has been prepared by the process comprising the steps of:
Dependencies are inferred from the claim text.