Metallo-organic precursors to titanium nitride
AssigneeFord Motor Company
InventorsCharles H. Winter, Tilak S. Lewkebandara, James W. Proscia, Philip H. Sheridan
Life of this patent
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Abstract
A titanium tetrahalide is reacted with a primary alkyl or aryl amine to prepare a metallo-organic precursor, which thereafter may be volatilized to form a gaseous chemical vapor deposition precursor to titanium nitride, or may be pyrolyzed to form bulk titanium nitride.
Claims22
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of:
- A) heating a metallo-organic precursor of the formula:
- (Cl.sub.2 TiNR).sub.2,
- wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to prepare a gaseous precursor;
- and
- B) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of:
- A) heating a metallo-organic precursor of the formula:
- (Cl.sub.2 TiNR).sub.2,
- wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms, to a temperature from about 100.degree. C. to about 3000.degree. C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor;
- and
- B) directing the gaseous precursor against the surface of the substrate at a temperature from about 300.degree. C. to about 600.degree. C. to deposit a coating of titanium nitride thereon.
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of:
- A) contacting a titanium tetrahalide with a primary alkyl or aryl amine, to prepare an intermediate metallo-organic compound;
- B) heating the intermediate metallo-organic compound to a temperature and for a period of time sufficient to prepare a metallo-organic precursor of the formula:
- (Cl.sub.2 TiNR).sub.2,
- wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms;
- C) heating the metallo-organic precursor to prepare a gaseous precursor;
- and
- D) directing the gaseous precursor against the surface of the substrate at a temperature sufficient to deposit a coating of titanium nitride thereon.
A process for depositing a coating of titanium nitride on a surface of a substrate, comprising the steps of:
- A) contacting a titanium tetrahalide with at least about 6 stoichiometric equivalents of a primary alkyl or aryl amine, optionally in the presence of a solvent, at a temperature from about -80.degree. C. to about 25.degree. C. to prepare an intermediate metallo-organic compound;
- B) heating the intermediate metallo-organic compound to a temperature from about 180.degree. C. to about 300.degree. C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, for a period of time sufficient to prepare a metallo-organic precursor of the formula:
- [Cl.sub.2 TiNR].sub.2,
- wherein R is a monovalent alkyl or aryl radical having from 1 to about 12 carbon atoms;
- C) heating the metallo-organic precursor to a temperature from about 100.degree. C. to about 300.degree. C., at a pressure from about 0.01 mm Hg to about 0.1 mm Hg, to prepare a gaseous precursor;
- and
- D) directing the gaseous precursor against the surface of the substrate at a temperature from about 300.degree. C. to about 600.degree. C. to deposit a coating of titanium nitride thereon.
Dependencies are inferred from the claim text.