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US 5,330,632 AGranted
Apparatus for cathode sputtering
AssigneeLeybold Aktiengesellschaft
InventorEggo Sichmann
Life of this patent
Estimating the term…
Abstract
A target has a front sputtering surface including an inner annular surface and an outer frustoconical surface which are concentric to an axis and adjoin at an angle to form a break. A ring of magnets and a first ring-like pole shoe outside the target, together with a second pole shoe inside the target and a yoke facing the back of the target, provide lines of flux through the target and arcuately over the front surface to form a first plasma ring over the break and a second plasma ring radially outside the break.
Claims19
Cathode sputtering apparatus comprising
- a target having a front to be sputtered, an opposing back, and a central aperture with an axis therethrough, said front having an inner annular surface and an outer frustoconical surface which are concentric to said axis and adjoin at an angle to form a break, said outer frustoconical surface facing said axis,
- a yoke facing the back of said target and extending radially to outside of said target,
- magnet means associated with said yoke at only one of radially outside said target and radially inside said central aperture,
- first pole shoe means extending axially from said magnet means to a first end surface, said first pole shoe means being separated from said magnet means by a gap,
- second pole shoe means associated with said yoke at the other of radially outside said target and radially inside said central aperture, said second pole shoe means extending axially from said yoke to a second end surface, said first and second end surfaces being arranged to provide arcuate lines of magnetic flux extending over the front of said target.
2 more elements
Cathode sputtering apparatus comprising
- a rotationally symmetric target having a front to be sputtered and a central aperture with an axis of symmetry therethrough, said front having a flat inner annular surface defining said aperture and an outer frustoconical surface which are concentric to said axis and join at an angle to from a break, said outer frustoconical surface facing said axis,
- means for forming a first plasma ring over said break, and
- means for forming a second plasma ring over said outer frustoconical surface and concentric to said first plasma ring.
Dependencies are inferred from the claim text.