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US 5,330,611 AGranted
Cubic boron nitride carbide films
AssigneeGeneral Motors Corporation
InventorGary L. Doll
Life of this patent
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Abstract
Thin films of cubic boron nitride carbide are provided on an underlying silicon substrate. The cubic boron nitride carbide films are deposited using laser ablation methods. The boron nitride film has a crystallographic lattice constant which can be varied depending upon the desired film composition and processing parameters. Preferably, the resulting thin film composition is characterized by a chemical formula of (BN).sub.1-x C.sub.x where x is about 0.2. The resulting films are particularly suitable for wear resistance and semiconducting applications over a wide range of temperatures.
Claims19
A method for forming thin films of cubic boron nitride carbide comprising the following steps:
- providing a substrate comprising silicon;
- providing a target of hexagonal boron nitride which has been diluted with carbon, said target being disposed in proximity with said silicon substrate;
- inducing vaporization of said target using a pulsed excimer laser operating at parameters sufficient to dissociate and vaporize said target, such that the vaporized material deposits onto a surface of said substrate to form a thin film of cubic boron nitride carbide on said surface and so that said film is electrically insulating and wherein said cubic boron nitride carbide includes a portion having the formula (BN).sub.1-x C.sub.x where 0.1<x<1.
A method for forming thin films of cubic boron nitride carbide comprising the following steps:
- providing a silicon substrate;
- providing a target of hexagonal boron nitride which has been diluted with carbon, said target being disposed in proximity with said silicon substrate;
- inducing vaporization of said target using a pulsed excimer laser operating at parameters sufficient to dissociate and vaporize said target, such that the vaporized material deposits onto a surface of said silicon substrate to form a thin film layer on said surface having a chemical composition of (BN).sub.1-x C.sub.x where 0.1<x<1.0 and so that said film is electrically insulating.
A method for forming thin films of cubic boron nitride carbide comprising the following steps:
- providing a silicon substrate oriented essentially throughout along a crystallographic axis of the substrate;
- providing a target of hexagonal boron nitride which has been diluted with carbon, said target being disposed in proximity with said silicon substrate;
- inducing vaporization of said target using a pulsed excimer laser operating at parameters sufficient to dissociate and vaporize said target;
- heating said substrate sufficient to sustain crystal growth, such that the vaporized material deposits onto a surface of said substrate to form a thin film layer of cubic boron nitride carbide on said surface having the chemical composition of (BN).sub.1-x C.sub.x where 0.1<x.ltoreq.0.2 and so that said film is electrically insulating.
1 more element
A method of forming thin films of cubic boron nitride carbide wherein the carbon concentration is varied throughout the film comprising the following steps:
- providing a substrate;
- providing a target having a plurality of regions, said target comprising hexagonal boron nitride which has been diluted with carbon so that said plurality of regions are characterized by a corresponding plurality of carbon concentrations, said target being disposed in proximity with said silicon substrate;
- heating said substrate to a temperature sufficient to sustain crystal growth on a surface of said substrate;
- inducing vaporization of a first of said plurality of regions on said target using a pulsed excimer laser operating at parameters sufficient to dissociate and vaporize said region which is characterized by a corresponding first carbon concentration;
- such that the first vaporized region material deposits onto said surface of said substrate to form a thin layer of cubic boron nitride carbide having said first carbon concentration on said surface and having the chemical composition of (BN).sub.1-x C.sub.x where 0.1<x.ltoreq.0.2;
- and
- repeating said step of inducing the vaporization of the hexagonal boron nitride/carbon target for each of said plurality of regions on said target so as to result in a cubic boron nitride carbide film having an increasing carbon concentration throughout the film.
4 more elements
A method for forming thin films comprising the following steps:
- providing a substrate oriented essentially throughout along a single crystallographic axis;
- providing a target of hexagonal boron nitride and a sufficiently high vapor pressure of a carbon-containing gaseous specie, said target being disposed in proximity with said substrate, said vapor pressure being sufficiently high to form a cubic boron nitride carbide compound upon vaporization of said boron nitride target;
- inducing vaporization of said target using a laser operating at parameters sufficient to dissociate and vaporize said target;
- heating said substrate to a temperature sufficient to sustain crystal growth, such that said vaporized material deposits onto a surface of said silicon substrate to form a thin film layer of cubic boron nitride carbide on said surface having the chemical composition of (BN).sub.1-x C.sub.x where x is greater than 0.1 but not greater than about 0.2 and so that said film has a lattice constant of about 0.36 nanometers.
1 more element
A method of epitaxially growing a thin film comprising boron nitride on a silicon substrate so that said film is substantially free of pin holes comprising:
- providing a target of hexagonal boron nitride which has been diluted with carbon, said target being disposed in proximity with said substrate;
- inducing vaporization of said target using a pulsed excimer laser sufficient to dissociate and vaporize said target so that the vaporized material deposits onto a surface of said substrate to form a thin film of a ternary compound having the formula (BN).sub.1-x C.sub.x where 0.1<x.ltoreq.0.2, and so that said thin film is substantially free of pin holes.
A method of forming a cubic boron nitride film substantially free of pin holes on a silicon substrate comprising:
- providing a target having a plurality of regions of hexagonally oriented boron nitride having the formula (BN).sub.1-x C.sub.x where 0<x.ltoreq.0.2;
- inducing vaporization of a first region of said target using a pulsed excimer laser so that the vaporized material deposits upon said substrate to form a first layer on said substrate having the formula (BN).sub.1-x C.sub.x where 0<x.ltoreq.0.2;
- and
- selectively inducing vaporization on other regions of said target using said laser so that successive layers of material are deposited on said substrate, each layer having a lower concentration of carbon than the previous layer and so that the top layer is substantially pure cubic boron nitride.
1 more element
A method comprising:
- providing a silicon substrate;
- providing a first target of boron nitride doped with carbon, and a second target having the formula (BN).sub.1-x C.sub.x where 0.ltoreq.x.ltoreq.1, said targets being disposed in proximity with said silicon substrate;
- inducing vaporization of a portion of said first target using a pulsed excimer laser sufficient to dissociate and vaporize said portion of the first target so that the vaporized material of the first target deposits onto a surface of said substrate to form a first thin film of a ternary compound having the formula (BN).sub.1-x C.sub.x where 0<x.ltoreq.0.2;
- and
- inducing vaporization of a portion of said second target using a pulsed excimer laser sufficient to dissociate and vaporize said portion of the second target so that the vaporized material of the second target deposits on the surface of the first thin film to form a second thin film having the formula (BN).sub.1-x C.sub.x where 0.2.ltoreq.x.ltoreq.1.
2 more elements
A method of using carbon to contract the lattice constant of a film comprising boron and nitrogen comprising:
- providing a substrate;
- providing a target of boron nitride which has been doped with carbon, said target being disposed in proximity with said substrate;
- inducing vaporization of said target using a pulsed excimer laser operating at parameters sufficient to dissociate and vaporize said target, such that the vaporized material deposits onto a surface of said substrate to form a thin film layer comprising a ternary compound comprising boron, nitrogen and carbon having a lattice constant ranging from about 0.356 to about 0.362 nanometers, said film having a cubic crystallographic structure wherein said carbon is equally substituted for both nitrogen and boron.
A method of making a film of cubic boron nitride carbide having a gradient of varying carbon concentration comprising:
- providing a substrate for depositing film of cubic boron nitride carbide;
- providing a first vapor comprising boron, nitrogen and carbon in proximity of said substrate so that said vapor deposits on said substrate to form a first layer of cubic boron nitride carbide having the formula (BN).sub.1-x C.sub.x where 0<x<1;
- providing a second vapor comprising boron, nitrogen and carbon in proximity of said substrate so that said vapor deposits on said first layer to form a second layer of cubic boron nitride carbide having the formula (BN).sub.1-y C.sub.y where 0<y<1, and wherein x does not equal y and so that said first and second layers form a film of cubic boron nitride having a gradient of varying carbon concentration.
Dependencies are inferred from the claim text.