US 5,329,808 AGranted

Atomic force microscope

AssigneeDigital Instruments, Inc.

InventorsVirgil B. Elings, John A. Gurley

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Abstract

This invention is an atomic force microscope having a digitally calculated feedback system which can perform force spectroscopy on a sample in order to map out the local stiffness of the sample in addition to providing the topography of the sample. It consists of a three-dimensional piezoelectric scanner, scanning either the sample of a force sensor. The force sensor is a contact type with a tip mounted on a cantilever and a sensor to detect the deflection of the lever at the tip. The signal from the sensor goes to an A-D convertor and is then processed by high-speed digital electronics to control the vertical motion of the sample or sensor. In operation, the digital electronics raise and lower the piezoelectric scanner during the scan to increase and decrease the force of the tip on the sample and to use the sensor signal to indicate the change in height of the tip to measure the which is the spring constant of the sample. This constant can be determined with nanometer spatial resolution. At the same time, the instrument can determine the topography of the sample with nanometer resolution. In an alternate embodiment, the lever is connected to a separate piezoelectric driver to vary the force on the tip. This improved AFM can also be used to periodically reset the force at which the tip contacts the sample and quickly replace the tip on the sample in the event that the tip loses contact with the surface.

Claims4

Dependent claims

An atomic force microscope comprising:

a sample holder and a probe with a sensing tip;
scanning means for creating relative movement between a sample in the holder and the sensing tip in X, Y, and Z coordinate directions;
sensing means for sensing the vertical position of the sensing tip;
and
feedback means connected between the sensing means and the scanning means for maintaining the tip in a preestablished relationship with respect to a scanned surface of the sample in the Z direction, thereby to obtain height information about the scanned surface of the sample, wherein the feedback means comprises,
analog-to-digital conversion means for obtaining an analog signal from the sensing means and for converting said analog signal into a digital signal,
digital computation means including program means for receiving said digital signal from said analog-to-digital conversion means and for calculating and outputting first digital vertical control signals which create desired relative movement between a sample in the holder and the sensing tip in the Z coordinate direction to maintain the tip in the pre-established relationship with respect to the scanned surface of the sample in the Z direction, and
first digital-to-analog conversion means for receiving said first digital vertical control signals from said digital computation means and for outputting analog control signals to the scanning means to effect movement thereof in the Z direction;
and wherein:
said digital computation means includes
means for determining that the sensing tip has come off the surface of the sample, including
means for determining whether a motion of the tip in a predetermined direction exceeds a predetermined threshold,
means for signalling said feedback means to move the sample in said predetermined direction when it is determined that the motion of the tip in the predetermined direction has exceeded said predetermined threshold,
means for determining whether or not upon said moving of said sample in said predetermined direction a responsive movement of said tip in said predetermined direction has been produced, and
means for determining that the tip has come off the surface of the sample when it has been determined that said responsive movement of the tip has not been produced;
and
means for generating control signals to place the tip back on the surface of the sample.

14 more elements

In a method of operating an atomic force microscope having a sample holder and a probe with a sensing tip, wherein a relative scanning movement between a sample on the holder and the sensing tip is created in X, Y, and Z coordinate directions and the position of the sensing tip is sensed, and a feedback operation is performed to maintain the tip in a preestablished relationship with respect to a scanned surface of the sample in the Z direction based on the sensed position of the tip, thereby to obtain height information about the scanned surface of the sample, the improvement comprising the steps of:

performing digital feedback comprising,
obtaining an analog signal position from the sensing means,
converting the analog signal with analog-to-digital conversion means into a digital signal,
receiving the digital signal from the analog-to-digital conversion means,
calculating and outputting, with digital computation means, first digital vertical control signals which create desired relative movement between a sample in the holder and the sensing tip in the Z coordinate direction to maintain the tip in the preestablished relationship with respect to the scanned surface of the sample in the Z direction,
receiving the first digital vertical control signals from the digital computation means, and
outputting analog control signals to the scanning means to affect movement thereof in the Z direction;
additionally comprising:
a) determining that the sensing tip has come off the surface of the sample, including
determining whether a motion of the tip in a predetermined direction exceeds a predetermined threshold,
producing control signals to move the sample in said predetermined direction when it is determined that the motion of the tip in the predetermined direction has exceeded said predetermined threshold,
determining whether or not upon said moving of said sample in said predetermined direction a responsive movement of said tip in said predetermined direction has been produced, and
determining that the tip has come off the surface of the sample when it has been determined that said responsive movement of the tip has not been produced;
and,
b) sending control signals to the scanning means to control the relative vertical position of the tip and sample to place the tip on the sample with a minimal loss of data.

12 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/085,053Filed 2 Jul 1993 · continuation
Priority: 8 Dec 1989
Granted: 19 Jul 1994
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01Q 10/065
Circuits or algorithms therefor: feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe…
B82Y 35/00
Methods or apparatus for measurement or analysis of nanostructures
G01Q 60/363
DC mode: contact-mode AFM
Y10S 977/851
Scanning probe control process: particular movement or positioning of scanning tip

Family

Serial447,851Parent of this continuation · filed 8 Dec 1989
Serial707,292Parent of this continuation · filed 30 May 1991
Serial831,876Parent of this continuation · filed 6 Feb 1992
US 5,224,376 AParent of this continuation
US 5,237,859 AParent of this continuation
US 5,329,808 AThis patent

From the US filing history. Foreign family members aren’t listed.