Method and system for decoupling inoperative passive elements on a semiconductor chip
AssigneeMicron Semiconductor, Inc.
InventorAndrew Horch
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AssigneeMicron Semiconductor, Inc.
InventorAndrew Horch
Estimating the term…
The present invention teaches a method and system for disconnecting shorted decoupling capacitors, wherein a semiconductor chip having a plurality of redundant decoupling capacitors. Each of the capacitors is coupled, by means of a link, to a bus having a predetermined voltage. Each link is accessible to light emissions, in planar view. The system comprises a tester for testing the operability of each of the capacitors. In a preferred embodiment, the tester comprises a heating element and a high voltage stress testing element. Under thermal and voltage stress, an infrared signal identifying shorted decoupling capacitors is generated by shorted decoupling capacitors. The system further comprises a sensor for sensing the infrared signal. In one embodiment of the present invention, the sensor comprises an emission microscope for multilevel inspection ("EMMI"). Each inoperable capacitor is decoupled from the bus by disintegrating the link with a laser in response to the infrared signal. In an alternate embodiment, the link is disintegrated by an acid etch comprising H.sub.2 SO.sub.4, H.sub.2 SO.sub.4 and H.sub.2 O.sub.2, or H.sub.2 PO.sub.4.
A method for decoupling inoperative elements on a semiconductor chip comprising the steps of:
A system for decoupling inoperative elements on a semiconductor chip, the semiconductor chip having a plurality of redundant passive elements, each of said elements coupled to a bus by means of a link, said bus associated with a predetermined voltage;
An automated system for decoupling inoperative capacitors on a semiconductor chip, the semiconductor chip having a plurality of redundant capacitors, each of said capacitors coupled to a bus by a link, said bus associated with a predetermined voltage, said link comprising substantially low resistive characteristics and being accessible to light emissions;
Dependencies are inferred from the claim text.