Surface acoustic wave device and method for producing the same
AssigneeSumitomo Electric Industries, Ltd.
InventorsTakahiro Imai, Hideaki Nakahata, Akihiro Hachigo, Naoji Fujimori
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Abstract
A surface acoustic wave device having a diamond layer, a piezoelectric layer and a comb-like electrode, in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, which surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method, which device has high stability and can be produced economically.
Claims6
A surface acoustic wave device comprising a diamond layer, a piezoelectric layer and a comb-like electrode, wherein said piezoelectric layer and said comb-like electrode are formed on a surface of said diamond layer, said surface having been in contact with a substrate used in the formation of said diamond layer by a vapor phase growth method, resulting in said surface having a surface roughness of 0.1 .mu.m or less.
A surface acoustic wave device comprising:
- a diamond layer having an exterior surface that has been etched from an adjoining substrate so as to have a surface roughness of 0.1 .mu.m or less;
- a piezoelectric layer on the exterior surface of said diamond layer;
- and
- a comb-like electrode on the exterior surface of said diamond layer.
Dependencies are inferred from the claim text.