Device for corpuscular-optical examination and/or processing of material samples

In a device for corpuscular-optical examination and processing of material samples, said device comprising a corpuscular-optical column for producing a corpuscular beam, a table system which mounts the material sample including a displacement mechanism by which the material sample can be displaced in at least two axes (x, y) which are at right angles to each other, the improvement wherein:

• the column and table system are rotatable relative to one another about a first axis of rotation which is at a first selected angle from the axis that is perpendicular to the plane formed by the x and y axes, said angle being no greater than 45.degree.;
• said first axis of rotation passes through the place to be examined or to be processed on the material sample;
• and
• the column being aligned so that its optical axis intersects said first axis of rotation at the place to be examined or to be processed on the material sample at a second angle equal in magnitude to said first selected angle and the rotation of the column about the first axis of rotation forms a conical surface centered about said first axis of rotation.