Production of barium titanate thin films
AssigneeMyrata Mfg., Co., Ltd.
InventorsYoshio Abe, Yukio Hamaji, Yukio Sakabe
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Abstract
A thin film of barium titanate is formed on a substrate by immersing the substrate in an aqueous solution containing barium ions and titanium alkoxide. The aqueous solution may contain not more than 20 vol % of one or more alkanolamines expressed by the general formula: HO(C.sub.n H.sub.2n)mNH.sub.3-m where n is not more than 10, and m=1, 2 or 3.
Claims5
A method for producing a thin film of barium titanate on a substrate, comprising the step of immersing a substrate in an aqueous solution containing barium ions and alkanolamine-modified titanium alkoxide under reaction conditions such that heterogeneous nucleation of barium titanate takes place on the substrate.
Dependencies are inferred from the claim text.