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US 5,328,668 AGranted
Synthesis of semiconductor grade tungsten hexafluoride
AssigneeBandgap Chemical Corporation
InventorsBruce J. Sabacky, Robert E. Doane
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Abstract
Semiconductor grade tungsten hexafluoride (WF.sub.6) is produced by reacting tungsten metal with a recirculating flow of gaseous WF.sub.6 containing a small concentration of fluorine in a heated reactor. The high purity WF.sub.6 produced is useful for deposition of tungsten metallization in fabricating VLSI integrated circuitry.
Claims1
A closed reactor system particularly adapted for reacting metallic tungsten with fluorine, comprising:
- a reservoir for holding liquid tungsten hexafluoride;
- a vaporizer for vaporizing liquid tungsten hexafluoride from said reservoir;
- heat supply means for supplying heat to said vaporizer;
- a pump for mixing gaseous fluorine with tungsten hexafluoride vapor;
- fluorine supply means coupled to said pump;
- reactor means for containing particular tungsten for reaction with fluorine delivered thereto from said pump;
- cooler means for cooling gaseous products from said reactor;
- condenser means coupled to said cooler means, means leading from said condenser means to said reservoir;
- product collector means for collect liquid tungsten hexafluoride overflowing said reservoir;
- and bypass means between said condenser and said pump to bypass said reservoir and said vaporizer with non-condensable gases from said condenser.
7 more elements
Dependencies are inferred from the claim text.