Functional fluid additives for acid copper electroplating baths

A process for electrolytic depositing of a copper deposit onto a substrate comprising the steps of:

• 1) providing an improved high acid/low copper plating bath having from about 15 to about 45 g/l copper ions, from about 45 to about 262 g/l of an acid and a bath soluble multi-functional polymer having at least one 4 to 10 carbon chain ether group derived from an alcohol and having a bisphenol A or an epoxy, propoxy and ethoxy functionality contained in said solution in effective amounts for leveling of imperfections and good adhesion and ductility;
• 2) providing a substrate for electrolytic plating thereover and immersing said substrate in the bath;
• and
• 3) subjecting said bath to a sufficient electroplating current for depositing the copper deposit on the substrate, wherein the copper deposit provides enough thickness and conductivity to allow any desired further processing of the work.

An improved copper electroplating bath for plating of copper onto substrates comprising:

• from about 13 to about 45 g/l copper ions;
• from about 45 to about 262 g/l of an acid;
• effective amounts of brighteners and leveling additives;
• and
• from about 1 to about 2000 mg/l of a functional fluid having the formula:
• (R.sub.1).sub.m --(R.sub.2).sub.n --(R.sub.3).sub.o --R.sub.4
• wherein:
• R.sub.1 is selected from the group consisting of:
• an alkyl ether group derived from an alcohol having from about 4 to about 10 carbon atoms;
• an alkyl ether group derived from a bisphenol A moiety;
• an epoxy moiety;
• or mixtures thereof and m is selected to be from about 1 to about 3;
• R.sub.2 and R.sub.3 are interchangeable in their order within the formula;
• R.sub.2 is selected from the group consisting of:
• ##STR8## and mixtures thereof;
• and R.sub.3 is selected from the group consisting of ##STR9## and mixtures thereof;
• and R.sub.4 is selected from the group consisting of H, CH.sub.3, an alkyl group, a hydroxyalkyl group, alkylether groups having 1 to 2 carbons, a polar alkyl group, an ionic constituent or an alkyl group having an ionic constituent and mixtures thereof wherein n and o are selected such that the ratio of n to o is from about 1/2:1 to about 1:30 and such that the functional fluid has a molecular weight of from about 500 to 10.000.