Method of producing sheets of crystalline material and devices made therefrom
AssigneeMassachusetts Institute of Technology
InventorsCarl O. Bozler, John C. C. Fan, Robert W. McClelland
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Abstract
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Claims18
A method of producing a sheet of crystalline material by growth on a substrate through apertures in a growth mask on the substrate comprising the combination of steps of:
- selecting a thickness for the sheet of single crystal material to be grown;
- forming the crystal growth mask on a crystallization substrate to produce parallel slits in the mask which establish unmasked areas of the substrate, the orientation of the parallel slits with respect to the crystal orientation of the crystallization substrate being correlated with the thickness and chosen to provide a selected ratio of lateral-to-vertical growth rates during deposition of crystalline material;
- depositing crystalline material on the substrate areas exposed at the slits under conditions which enable lateral growth of crystalline material over the mask;
- continuing lateral overgrowth of the single crystal material over the mask until a sheet of the crystalline material has been formed;
- fabricating an electronic device in the single crystal sheet;
- bonding the single crystal sheet with the electronic device to a second substrate with an adhesive;
- and
- removing the single crystal sheet with the electronic device from the crystallization substrate.
Dependencies are inferred from the claim text.