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US 5,327,625 AGranted
Apparatus for forming nanometric features on surfaces
AssigneesMassachusetts Institute of Technology, United States of America
InventorsHarry R. Clark, Jr., Gerald W. Iseler, Brian S. Ahern
Life of this patent
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Abstract
An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.
Claims2
An instrument for forming nanometric features on surfaces of materials comprising:
- a support for moving a workpiece on X-Y-Z axes;
- motor means for imparting movement to the support;
- a laser system for sensing movement on the X-Y-Z axes;
- a scribing tool of nanometric proportions engagable with the workpiece;
- piezoelectric actuating means mounting the tool for movement relative to the workpiece;
- and
- a computer processing unit for receiving signals from the laser system and programmed to control the motor means and the piezoelectric actuating means in closed loops such that the tool imparts nanometric surface features to the workpiece in predefined patterns.
4 more elements
Dependencies are inferred from the claim text.