Bridge for connecting cores in a manufacturing equipment of polycrystal silicon
AssigneeKomatsu Electronic Metlas Co., Inc.
InventorsMinoru Ohtsuki, Yusuke Miyamoto, Kenichi Nagai
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Abstract
In a equipment for manufacturing polycrystal silicon by depositing it on filament cores electrically heated, by means of thermal decomposition of monosilane gas, a bridge for connecting said filament cores is constituted by tantalum, molybdenum, tungsten or zirconium. Preferably the sectional shape of the connection bridge may be of upturned triangle, tear droplet or rectangle.
Claims3
A bridge connecting filament cores in polycrystalline silicon manufacturing equipment, said bridge consisting essentially of a material selected from the group consisting of molybdenum, tungsten and zirconium;
- wherein said filament cores are capable of being electrically heated and coated with polycrystalline silicon;
- wherein said polycrystalline silicon is vapor deposited by the thermal decomposition of monosilane gas.
Dependencies are inferred from the claim text.