Movement hampering device for an exposure apparatus
AssigneeMita Industrial Co., Ltd.
InventorsShoichi Kitagawa, Mitsugu Miyamoto, Daisuke Hayashi, Hideki Ishida, Hiroshi Kusumoto
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AssigneeMita Industrial Co., Ltd.
InventorsShoichi Kitagawa, Mitsugu Miyamoto, Daisuke Hayashi, Hideki Ishida, Hiroshi Kusumoto
Estimating the term…
The exposure apparatus is provided with a first mirror frame movement hampering means for hampering the movement of the first mirror frame in the exposing direction. The first mirror frame movement hampering means has a closure mounted on an operating opening on the main body and a movement hampering member mounted on the closure and positioned near a linking portion of the driving device of the first mirror frame and at a position at which the movement in the exposing direction is interfered. The movement hampering member is mounted on the closure to adjust its position freely within a predetermined range in the reciprocatingly moving direction of the first mirror frame.
An exposure apparatus comprising:
Dependencies are inferred from the claim text.