Positioning device using Lorentz forces
AssigneeU.S. Philips Corporation
InventorsGerard Van Engelen, Adrianus G. Bouwer
Life of this patent
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Abstract
A positioning device includes a table (5, 69), which is displaceable in two coordinate directions (X, Y) by means of Lorentz forces of electric linear motors over a base (3) and is guided over the base (3) by means of a static gas bearing, which has an air gap thickness independent of the coil systems and magnet systems (15-21, 37-43) in the motors. The positioning device is particularly suitable for the manufacture of masks with patterns for integrated circuits.
Claims5
A positioning device comprising a table, which is displaceable in at least coordinate directions (X, Y) by means of at least one electric linear X-motor and at least one electric linear Y-motor and is supported without contact by a static gas bearing on a base, coil systems and magnet systems corresponding to the two motors being connected to the base and to the table, respectively, characterized in that during operation with a substantially constant, coil-system-independent air gap thickness in the static gas bearing the base connected to said coil systems and the table connected to said magnet systems are guided with respect to each other and are coupled to each other in said at least two coordinate directions solely by Lorentz forces produced by the coil systems and magnet systems.
Dependencies are inferred from the claim text.