US 5,327,005 A · Striped contact IR detector

Abstract

An IR detector array (10) wherein a metal contact pad (20) makes contact to an underlying radiation detector through one or more thin, electrically conductive stripes (20a). The striped pad contact shape is used in conjunction with a highly absorptive and opaque coating (18) that is interposed between a bottom surface of the contact pad and a top surface of the radiation detector. The highly absorptive coating serves to mask the bottom surface of the metal contact pad from any radiation that would impinge thereon and be reflected. As a result, stray or unabsorbed radiation reaching to a region of the contact pad encounters only the relatively small target presented by the edge of the one or more thin electrically conductive stripes. Furthermore, the one or more thin stripes are aligned with respect to a radiation scan axis and/or rotation axis so as to further minimize the width of the contact edge presented to the unabsorbed radiation, thereby further reducing the probability of an unwanted reflection occurring.

Claims13

Dependent claims

A backside-illuminated radiation detector comprising:

a radiation responsive region have a first surface for receiving incident radiation and a second, opposite surface;
an electrical contact that is conductively coupled to the second surface of the radiation responsive region, said contact having a substantially planar upper portion having a first surface and an oppositely disposed second surface facing said second surface of said radiation responsive region, said second surface of said contact having at least one substantially linear, stripe-like portion projecting therefrom and oriented at least approximately perpendicular to a rotation axis of the detector for conductively coupling said electrical contact to said radiation responsive region;
and
a radiation absorptive region interposed between said second surface of said radiation responsive region and said second surface of said contact for absorbing substantially all radiation that would otherwise impinge on and reflect from said second surface of said contact.

1 more element

An array of back-side illuminated photovoltaic radiation detectors comprising:

an electrically insulating substrate comprised of a material that is substantially transparent to radiation having wavelengths of interest, the radiation being incident upon a first surface of said substrate;
a first semiconductor layer overlying a second surface of said substrate and having a first type of electrical conductivity, said first semiconductor layer absorbing radiation received from said substrate and generating charge carriers therefrom, said first semiconductor layer being differentiated into a plurality of active regions;
a second semiconductor layer overlying said first semiconductor layer within each of said active regions, said second semiconductor layer having a second type of electrical conductivity for forming a p-n junction with each of said active regions;
a passivation layer overlying said first and said second semiconductor layers;
an opaque, radiation absorptive layer overlying said passivation layer;
and
for each of said active regions, an electrical contact that is conductively coupled to said second semiconductor layer by portions thereof that pass through one or more openings within an underlying volume of said opaque, radiation absorptive layer and said passivation layer, each of said one or more portions having a width, a length, and a depth, and wherein the width is less than the length and the length is disposed approximately perpendicularly to a rotation axis of the array for reducing reflection of radiation from said contact portions.

4 more elements

Dependencies are inferred from the claim text.

Striped contact IR detector

Life of this patent

Striped contact IR detector

Life of this patent

Abstract

Claims13