Transmission electron microscope environmental specimen holder

An environmental chamber for a transmission electron microscope, comprising:

• a transmission electron microscope having a specimen holder, the specimen holder having a shaft which extends into an electron beam;
• a specimen held in a predetermined position by the specimen holder within the transmission electron microscope such that an electron beam is directed through the specimen to a detector;
• a first removable sleeve which surrounds the shaft of the specimen holder;
• a first end seal at a first end of the first removable sleeve which forms a seal between the first removable sleeve to the specimen holder;
• a second end seal at an end opposing the first end of the first removable sleeve, the second end seal forming a seal between the first removable sleeve to the specimen holder in such a way as to form a first differential chamber;
• a first aperture formed in the first removable sleeve such that the electron beam passes through the first aperture to impinge upon a predetermined portion of the specimen;
• a second aperture formed in the first removable sleeve such that the electron beam passes through the second aperture after passing through the specimen to impinge upon the detector;
• a first thin window fabricated from a thin film of carbon material which fills the first aperture such that gaseous material is blocked but the electron beam is substantially undisturbed;
• a second thin window fabricated from a thin film of carbon material which fills the second aperture such that gaseous material is blocked but the electron beam is substantially undisturbed;
• a first vacuum line which allows gases to be removed from the first differential chamber;
• a second removable sleeve which surrounds both the shaft of the specimen holder and the first removable sleeve;
• a third end seal at a first end of the second removable sleeve which forms a seal between the second removable sleeve to the specimen holder;
• a fourth end seal at an end opposing the first end of the second removable sleeve, the fourth end seal forming a seal between the second removable sleeve to the specimen holder in such a way as to form a second differential chamber which encloses the first removable sleeve and the first differential chamber;
• a third aperture formed in the second removable sleeve such that the electron beam passes through the third aperture to impinge upon a predetermined portion of the specimen;
• a fourth aperture formed in the second removable sleeve such that the electron beam passes through the fourth aperture after passing through the specimen to impinge upon the detector;
• a third thin window fabricated from a thin film of carbon material which fills the third aperture such that gaseous material is blocked but the electron beam is substantially undisturbed;
• a fourth thin window fabricated from a thin film of carbon material which fills the fourth aperture such that gaseous material is blocked but the electron beam is substantially undisturbed;
• a second vacuum line which allows gases to be removed from the second differential chamber;
• and
• a reactive inlet line extending into the first differential chamber in such a way as to allow a desired material to be introduced onto the specimen, the reactive inlet line being located at a predetermined distance from the first vacuum line such that material which escapes from the specimen into the differential chamber is substantially removed by the first vacuum line.

A method for fabricating an environmental chamber for a transmission electron microscope, comprising:

• providing a transmission electron microscope having a removable specimen holder;
• holding a specimen in a predetermined position within the transmission electron microscope such that an electron beam is directed through the specimen to a detector;
• surrounding the specimen holder with a first removable sleeve;
• sealing both ends of the first removable sleeve to the specimen holder by means of a plurality of O-rings in such a way as to form a differential chamber;
• forming two apertures in the first removable sleeve such that the electron beam passes through the two apertures;
• filling the two apertures with a thin film of carbon material such that passage of gaseous material is blocked but passage of the electron beam is substantially undisturbed;
• evacuating gases from the first differential chamber with a first vacuum line;
• and
• introducing material onto the specimen by a reactive inlet line which extends into the first differential chamber.