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US 5,326,892 AGranted
Bimetallic alkoxide reagents and method of making the same
AssigneeAdvanced Technology Materials, Inc.
InventorBrian A. Vaartstra
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AssigneeAdvanced Technology Materials, Inc.
InventorBrian A. Vaartstra
Estimating the term…
Bimetallic alkoxide compounds useful as source reagents for chemical vapor deposition of ferroelectric ceramics such as lead titanate and lead zirconate, and lead zirconate titanate (PZT). The novel bimetallic alkoxide compounds of the present invention have the formula R.sup.1.sub.x PbM(OR.sup.2).sub.y (OR.sup.3).sub.z (1) or R.sup.1.sub.x PbOM(OR.sup.2).sub.y (OR.sup.3).sub.z (2), wherein M is a Group IVB metal, especially titanium or zirconium, and R.sup.1, R.sup.2, and R.sup.3 are independently selected hydrocarbyls, especially C1-C6 alkyls. In these compounds, lead may be present in the +2 or +4 oxidation states. For compound 1, when lead is in the +2 oxidation state, x may be 0, 1 or 2, y and z range from 0 to 4, and x+y+z=6. When lead is present in the +4 oxidation state, x may range from 0 to 3, y and z range from 0 to 6, and x+y+z=8. For compound 2, when lead is in the +2 oxidation state, x may be 0, 1 or 2, y and z range from 0 to 4, and x+y+z=4. When lead is present in the +4 oxidation state, x may range from 0 to 3, y and z range from 0 to 4, and x+y+z=6. For 1 and 2, R.sup.1, R.sup.2, and R.sup.3 are hydrocarbyl groups such as alkyl, cycloalkyl, alkenyl or aryl. R.sup.1 is preferably methyl, ethyl, propyl, cyclopentadienyl, or methylcyclopentadienyl, and most preferably methyl or ethyl. R.sup.2 and R.sup.3 are preferably t-butyl, s-butyl, i-propyl, cyclohexyl, or neopentyl, and most preferably t-butyl or s-butyl.
A bimetallic alkoxide compound having a 1:1 atomic ratio of lead and a Group IVB element and having formula R.sup.1.sub.x PbM(OR.sup.2).sub.y (OR.sup.3).sub.z ;
A bimetallic alkoxide compound having a 1:1 atomic ratio of lead and a Group IVB element and having formula R.sup.1.sub.x PbM(OR.sup.2).sub.y (OR.sup.3).sub.z ;
A bimetallic oxoalkoxide compound having a 1:1 atomic ratio of lead and a Group IVB element and formula R.sup.1.sub.x PbOM(OR.sup.2).sub.y (OR.sup.3).sub.z ;
A compound according to claim 11, wherein M is titanium.
A bimetallic alkoxide compound having a 1:1 atomic ratio of lead and a Group IVB element and having formula R.sup.1.sub.x PbM(OR.sup.2).sub.y (OR.sup.3).sub.z ;
A compound according to claim 14, wherein R.sup.2 and R.sup.3 are t-butyl, x is zero, and (y+z) is six.
Dependencies are inferred from the claim text.