Transparent quartz glass and process for its production
AssigneeAsahi Glass Company, Limited
InventorsSusumu Yaba, Shinya Kikugawa
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Abstract
Quartz glass obtained by flame-hydrolyzing a glass-forming raw material to obtain fine particles of quartz glass, having the fine particles of quartz glass deposited and grown on a substrate to obtain a porous quartz glass product and heating the porous quartz glass product to obtain a transparent quartz glass product, which has an OH content of not more than 10 ppm and a halogen content of at least 400 ppm and which contains hydrogen.
Claims3
Quartz glass obtained by flame-hydrolyzing a glass-forming raw material to obtain fine particles of quartz glass, having the fine particles of quartz glass deposited and grown on a substrate to obtain a porous quartz glass product and heating the porous quartz glass product to obtain a transparent quartz glass product, which has an OH content of not more than 10 ppm, a halogen content of at least 400 ppm and which contains hydrogen, wherein the amount of hydrogen molecules released when heated to 1,000.degree. C. under vacuum is in the range of from 1.times.10.sup.18 to 1.times.10.sup.20 molecule/m.sup.2.
Dependencies are inferred from the claim text.