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US 5,326,227 AGranted
Exhaust apparatus with vacuum pump
AssigneeEbara Corporation
InventorsKazutoshi Nagai, Tohru Satake, Hideaki Hayashi, Takanari Yasui
Life of this patent
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Abstract
An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
Claims8
A high vacuum pumping system, comprising:
- a vacuum pump;
- and
- an exhaust apparatus provided between said vacuum pump and a vessel to be evacuated, said exhaust apparatus including
- a first grid electrode, a second grid electrode installed opposite to the first grid electrode, a vessel for accommodating the two electrodes, means for inducing discharging between said first grid electrode and said second grid electrode by coupling of a high frequency field, said means for inducing discharging being disposed outside of said vessel and connected to a high frequency power supply, and a DC power supply for applying a high voltage between said first and second grid electrodes so as to get the second grid electrode positive.
1 more element
A high vacuum pumping system, comprising:
- a vacuum pump;
- and
- an exhaust apparatus provided between said vacuum pump and a vessel to be evacuated, said exhaust apparatus including
- a first grid electrode, a second grid electrode installed opposite to the first grid electrode, a vessel for accommodating the two electrodes, a coil disposed outside of the vessel and connected to a high frequency power supply, and a DC power supply for applying a high voltage between said first and second grid electrodes so as to get the second grid electrode positive.
1 more element
A high vacuum pumping system, comprising:
- a vacuum pump;
- and
- an exhaust apparatus provided between said vacuum pump and a vessel to be evacuated, said exhaust apparatus including
- a first grid electrode, a second grid electrode provided opposite to the first grid electrode, a vessel for accommodating the two electrodes, electrode means provided at the outside of the vessel and connected to a high frequency power supply, and a DC power supply for applying a high voltage between said first and second grid electrodes so as to get the second grid electrode positive.
1 more element
Dependencies are inferred from the claim text.