US 5,326,170 AGranted

Wireless temperature calibration device and method

AssigneeTexas Instruments Incorporated

InventorsMehrdad M. Moslehi, Habib Najm, Lino A. Velo

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Abstract

A method for calibrating at least one temperature sensor. A wafer (30) having calibration structures of a material having a melting point in the range of 150.degree. to 1150.degree. C. is provided. The temperature sensor is operable to detect a temperature dependent characteristic of the wafer and output a signal corresponding to the temperature depending characteristic. The power input is selectively varied and the wafer temperature is ramped for a calibration run. A wafer characteristic, such as wafer reflectance, radiance, or emissivity, is monitored. A first step change in the wafer characteristic corresponding to a wafer temperature equal to the melting point of the calibration structures is detected and a set of calibration parameters for each temperature sensor being calibrated is calculated.

Claims17

Dependent claims

A method for calibrating at least one temperature sensor comprising the steps of:

providing a wafer having at least one plurality of calibration structures of a material having a melting point in the range of 150.degree. to 1150.degree. C., wherein said at least one temperature sensor is operable to detect a temperature dependent characteristic of said wafer and output a signal corresponding to said temperature depending characteristic;
selectively varying a power input and ramping the wafer temperature to said temperature depending characteristic;
selectively varying a power input and ramping the wafer temperature for a calibration run;
directing at least one light beam at the wafer;
monitoring the wafer surface reflectance at the point at which each light beam is directed during the step of ramping the wafer temperature;
detecting a first step change in the wafer surface reflectance corresponding to a wafer temperature equal to the melting point of said calibration structures;
determining a first set of sensor parameters corresponding to said first step change;
and
calculating a set of calibration parameters for each temperature sensor being calibrated.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/115,920Filed 1 Sep 1993 · continuation
Priority: 11 Aug 1992
Granted: 5 Jul 1994
Term ends: Not estimatedThe source records don’t support an estimate.

Classification5 codes

G01K 15/005
Testing or calibrating of thermometers: calibration
G01J 5/53
Using comparison with reference sources, e.g. disappearing-filament pyrometer: reference sources, e.g. standard lamps; Black bodies
G01J 5/80
Radiation pyrometry, e.g. infrared or optical thermometry: calibration
G01K
Measuring temperature