Magnetically driven resonant disc pressure transducer
AssigneeAlliedSignal Inc.
InventorsFred Petri, Gene E. Gassner
Life of this patent
Estimating the term…
Abstract
A vibrating disc transducer assembly suitable for accurately measuring high pressures utilizes a transducer having a vibratory disc that is preferably fabricated from silicon and excited to vibrate in the thickness-shear mode. The excitation is accomplished by placing the resonator in a magnetic field and passing an electric current through electrodes on opposite sides of the disc. The transducer is supported in a housing that communicates with the medium whose pressure is being measured.
Claims21
A pressure transducer for measuring the pressure of a fluid, comprising:
- a vibratory disc adapted to be disposed in communication with said fluid;
- and
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid, wherein said disc is fabricated from a crystalline non-piezoelectric material.
A pressure transducer as for measuring the pressure of a fluid, comprising:
- a vibratory disc adapted to be disposed in communication with said fluid;
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid;
- and
- an enclosure surrounding said vibratory disc, wherein said disc and said enclosure are fabricated from silicon.
A pressure transducer for measuring the pressure of a fluid, comprising:
- a vibratory disc adapted to be disposed in communication with said fluid;
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid;
- and
- an enclosure surrounding said vibratory disc, wherein said enclosure includes a pair of plates, each plate having a reduced thickness portion, one plate being disposed on each side of said disc, said reduced thickness portions forming two cavities, each cavity being disposed between each plate and the disc.
A pressure transducer for measuring the pressure of a fluid, comprising:
- a vibratory disc adapted to be disposed in communication with said fluid;
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid, wherein said exciting means includes means for magnetically exciting said disc;
- and wherein said magnetic exciting means includes a magnetic structure around said disc.
A pressure transducer for measuring the pressure of a fluid, comprising:
- a vibratory disc;
- an enclosure surrounding said vibratory disc adapted to be disposed in communication with said fluid;
- and
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid, wherein said disc and said enclosure are fabricated from silicon.
A pressure transducer for measuring the pressure of a fluid, comprising:
- a vibratory disc;
- an enclosure surrounding said vibratory disc adapted to be disposed in communication with said fluid;
- and
- means for exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid, wherein said exciting means includes means for magnetically exciting said disc and wherein said magnetic exciting means includes a magnetic structure around said enclosure.
A method for measuring the pressure of a fluid, comprising:
- providing a vibratory disc in communication with the pressure of said fluid;
- exciting said disc to vibrate in a thickness-shear mode, the frequency of vibration being representative of the pressure of said fluid wherein said disc is magnetically excited;
- and
- providing a magnetic structure around said disc.
Dependencies are inferred from the claim text.