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US 5,323,712 AGranted
Table moving apparatus
AssigneeKabushiki Kaisha Toshiba
InventorNobutaka Kikuiri
Life of this patent
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Abstract
A table moving apparatus includes a reference table, a object movable holizontally to generate a driving force acting holizontally, a lever member receiving the driving force to swing round a fulcrum and change the driving force to a vertical force, and a movable table receiving the vertical force to move vertically. The height of movable table on the reference table can be made relatively low. Pitching and rolling errors can be reduced. When the ratio of the lever member is of the reduction type, the resolution of the movable table can be made high or good. When the ratio of the lever member is of the enlargement type, the movable range of the movable table can be made large.
Claims16
A table moving apparatus comprising:
- a reference table having a reference plane;
- an actuator movable in a first direction parallel to the reference plane to generate a driving force acting in the first direction, said actuator coupled to a drive source for moving said actuator to generate the driving force;
- a lever member, having a fulcrum supported by the reference table, a first point to which the actuator is applied and a second point at which a second force is generated, said lever member receiving at the first point the driving force from said actuator, said lever member pivoting about the fulcrum in response to the reception of the driving force from said actuator at the first point to generate at the second point the second force acting in a second direction perpendicular to the reference plane, said first and second points located on said lever member such that upon pivoting of said lever member about said fulcrum said first and second points each move respective movement distances, and wherein said first and second points are located on said lever member such that movement distances of said first point have a linear relationship to corresponding movement distances of said second point during pivoting of said lever member about said fulcrum;
- and
- a movable table, supported by the reference table, for receiving the second force from the second point of said lever member to cause movement of the movable table in the second direction, thereby positioning said movable table with respect to said reference table;
- wherein an interval between the fulcrum and the first point is made longer than that between the fulcrum and the second point.
3 more elements
A table moving apparatus comprising:
- a reference table having a reference plane;
- an actuator movable in a first direction parallel to the reference plane to generate a driving force acting in the first direction, said actuator coupled to a drive source for moving said actuator to generate the driving force;
- a lever member, having a fulcrum supported by the reference table, a first point to which the actuator is applied and a second point at which a second force is generated, said lever member receiving at the first point the driving force from said actuator, said lever member pivoting about the fulcrum in response to the reception of the driving force from said actuator at the first point to generate at the second point the second force acting in a second direction perpendicular to the reference plane, said first and second points located on said lever member such that upon pivoting of said lever member about said fulcrum said first and second points each move respective movement distances, and wherein said first and second points are located on said lever member such that movement distances of said first point have a linear relationship to corresponding movement distances of said second point during pivoting of said lever member about said fulcrum;
- and
- a movable table, supported by the reference table, for receiving the second force from the second point of said lever member to cause movement of the movable table in the second direction, thereby positioning said movable table with respect to said reference table;
- wherein the first point of the lever member is located on one side of the reference plane and the second point thereof and the movable table are located on the other side of the reference plane.
3 more elements
A table moving apparatus comprising:
- a reference table having a reference plane;
- an actuator movable in a first direction parallel to the reference plane to generate a driving force acting in the first direction, said actuator coupled to a drive source for moving said actuator to generate the driving force;
- a lever member, having a fulcrum supported by the reference table, a first point to which the actuator is applied and a second point at which a second force is generated, said lever member receiving at the first point the driving force from said actuator, said lever member pivoting about the fulcrum in response to the reception of the driving force from said actuator at the first point to generate at the second point the second force acting in a second direction perpendicular to the reference plane, said first and second points located on said lever member such that upon pivoting of said lever member about said fulcrum said first and second points each move respective movement distances, and wherein said first and second points are located on said lever member such that movement distances of said first point have a linear relationship to corresponding movement distances of said second point during pivoting of said lever member about said fulcrum;
- and
- a movable table, supported by the reference table, for receiving the second force from the second point of said lever member to cause movement of the movable table in the second direction, thereby positioning said movable table with respect to said reference table;
- wherein said movable table is supported on the reference table by an elastic member such that said reference table is urged by the elastic member along the second line and toward the second point of the lever member.
3 more elements
A table moving apparatus comprising:
- a reference table having a reference plane;
- an actuator movable in a first direction parallel to the reference plane to generate a driving force acting in the first direction, said actuator coupled to a drive source for moving said actuator to generate the driving force;
- a lever member, having a fulcrum supported by the reference table, a first point to which the actuator is applied and a second point at which a second force is generated, said lever member receiving at the first point the driving force from said actuator, said lever member pivoting about the fulcrum in response to the reception of the driving force from said actuator at the first point to generate at the second point the second force acting in a second direction perpendicular to the reference plane, said first and second points located on said lever member such that upon pivoting of said lever member about said fulcrum said first and second points each move respective movement distances, and wherein said first and second points are located on said lever member such that movement distances of said first point have a linear relationship to corresponding movement distances of said second point during pivoting of said lever member about said fulcrum;
- and
- a movable table, supported by the reference table, for receiving the second force from the second point of said lever member to cause movement of the movable table in the second direction, thereby positioning said movable table with respect to said reference table;
- the table moving apparatus further including at least three lever members and the second points on these lever members are separated from one another.
3 more elements
Dependencies are inferred from the claim text.