Electrical connecting member and method of manufacturing the same

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• intermittently injecting developing liquid to the surface of said photosensitive resin while rotating and/or revolving said photosensitive resin, to thereby forming a plurality of apertures through which the surface of said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members;
• and
• removing the remaining portions of said base body.

A method of manufacturing an electrical connecting member having a holding member having an electrically insulating material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• injecting developing liquid and gas to the surface of said photosensitive resin at a time or alternately to thereby form a plurality of apertures through which the surface of said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members;
• and
• removing the remaining portions of said base body.

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other surface of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members;
• and
• removing the remaining portions of said base body.

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of electroplating said electrically conductive material with the diameter of said apertures being equal to or greater than 10 .mu.m and equal to or less than 150 .mu.m, the Reynolds number of liquid flow imparted to plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm.sup.2 and equal to or less than 5 mA/cm.sup.2 ;
• and
• removing the remaining portions of said base body.

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being a step which satisfies at least one of the condition that plating liquid shall be at 0.degree. C. to 40.degree. C., the condition that the flow velocity of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating, and the condition that the current density of the plating liquid shall be made variable in conformity with the growth of said electrically conductive material by plating;
• and
• removing the remaining portions of said base body.

A method of manufacturing an electrical connecting member having a holding member having an electrically insulative material, and a plurality of electrically conductive members provided in a mutually insulated state in said holding member, one end of each of said electrically conductive members being exposed on one surface of said holding member and the other end of each of said electrically conductive members being exposed on the other surface of said holding member, said method including the steps of:

• providing photosensitive resin which provides said holding member on a base body;
• applying light to said photosensitive resin through a photomask forming a predetermined pattern to thereby expose said photosensitive resin to the light;
• propagating an ultrasonic wave through said photosensitive resin while injecting developing liquid to the surface of said photosensitive resin, thereby forming a plurality of apertures through which said base body is exposed;
• etching the exposed portions of said base body to thereby form recesses communicating with said apertures;
• filling said apertures and said recesses with an electrically conductive material which provides said electrically conductive members, this step being the step of effecting electroplating by the use of plating liquid having 30 ppm to 100 ppm of Tl or 30 ppm to 500 ppm of As added as an additive thereto with the diameter of said apertures being equal to or greater than 10 .mu.m and equal to or less than 150 .mu.m, the Reynolds number of liquid flow imparted to the plating liquid being a laminar flow equal to or greater than 50 and equal to or less than 450, and current density imparted to between two electrodes being equal to or greater than 1 mA/cm.sup.2 and equal to or less than 5 mA/cm.sup.2 ;
• and
• removing the remaining portions of said base body.