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US 5,321,453 AGranted
Probe apparatus for probing an object held above the probe card
AssigneeTokyo Electron Limited
InventorsShigeoki Mori, Wataru Karasawa
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Abstract
A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.
Claims10
A probe apparatus, comprising:
- a probe card having a plurality of probes;
- a wafer holding means arranged sideward or upward of said probe card for holding a semiconductor wafer;
- a test head electrically connected to the probes of the probe card;
- and
- a tester electrically connected to said test head for detecting electrical characteristics of the semiconductor wafer based on an output signal generated from the semiconductor wafer;
- wherein said wafer holding means is provided with an angle adjusting means for adjusting the direction of the semiconductor wafer such that a surface of the semiconductor wafer is adjusted so as to be maintained substantially parallel with a measuring face of the test head.
3 more elements
Dependencies are inferred from the claim text.