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US 5,320,007 AGranted
Method for positioning and processing LPE films
AssigneeTexas Instruments Incorporated
InventorDonald F. Weirauch
Life of this patent
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Abstract
A method and apparatus are provided for holding and positioning objects for a single diamond point turning operation. The objects which may include liquid phase epitaxy films are mounted on multiple platforms (10, 46). The platforms (10, 46) are securely connected to a base (20). The platforms (10, 46) are positioned, independently from one another, for elevation and orientation relative to the base (20) while the platforms (10, 46) are securely connected to the base (20).
Claims5
A method of processing objects, comprising the steps of:
- holding one substrate with an LPE film on each of a plurality of platforms;
- mounting said platforms to a base;
- and
- positioning said platforms, independently from one another, for elevation and orientation relative to said base while said platforms are securely connected to said base.
- simultaneously removing an independently adjusted amount from each of the LPE films.
2 more elements
Dependencies are inferred from the claim text.