Method and apparatus for detecting wavelength of laser beam
AssigneeMitsui Petrochemical Industries, Ltd.
InventorsMitsugu Terada, Ken Ohmata, Michito Uehara, Hideaki Shibata, Yasuo Oeda, Yuichiro Terashi
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Abstract
A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.
Claims5
A method for detecting a wavelength of a laser beam comprising
- simultaneously introducing a reference laser oscillation light and a measured laser oscillation light into an etalon,
- irradiating concentric circular interference stripes caused by said reference laser oscillation light and said measured laser oscillation light emanating from the etalon on a one dimensional photodetector array arranged at a position including a diameter portion of the concentric circular interference stripes,
- measuring a length of a diameter or chord of the concentric circular interference stripe caused by the reference laser oscillation light and a length of a diameter or chord of the concentric circular interference stripe caused by the measured laser oscillation light, and determining the ratio therebetween, and
- multiplying the wavelength of the reference laser oscillation light by said ratio to determine the wavelength of the measured laser oscillation light.
An apparatus for detecting a wavelength of a measured laser beam consisting of
- an etalon, having an input side and an output side, for simultaneously receiving a reference laser oscillation light and a measured laser oscillation light on said input side and radiating concentric circular interference stripes caused by said reference laser oscillation light and said measured laser oscillation light from said output side,
- a one-dimensional photodetector array, arranged on said output side of said etalon, to receive radiation from said etalon, at a position including a diameter portion of said concentric circular interference stripes emanating from said etalon, and
- a position measuring means, operatively connected to said one-dimensional photodetector array, for simultaneously measuring a length of a diameter or a chord of a concentric circular interference strip caused by said reference laser oscillation light and a length of a diameter or a chord of a concentric circular interference strip caused by said measured laser oscillation light and determining the ratio therebetween.
An apparatus for detecting a wavelength of a measured laser beam consisting of
- an etalon, having an input side and an output side, for simultaneously receiving a reference laser oscillation light and a measured laser oscillation light on said input side and radiating concentric circular interference stripes caused by said reference laser oscillation light and said measured laser oscillation light from said output side,
- a reference laser device, optically connected to said etalon, for supplying a reference laser oscillation light of predetermined wavelength to said etalon when a measured laser oscillation light is supplied to said etalon,
- a one-dimensional photodetector array, arranged on said output side of said etalon, to receive radiation from said etalon, at a position including a diameter portion of said concentric circular interference stripes emanating from said etalon, and
- a position measuring means, operatively connected to said one-dimensional photodetector array, for simultaneously measuring a length of a diameter or a chord of a concentric circular interference stripe caused by said reference laser oscillation light and a length of a diameter or a chord of a concentric circular interference stripe caused by said measured laser oscillation light and determining the ratio therebetween.
Dependencies are inferred from the claim text.