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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTakehiko Nakahara, Masao Koshinaka, Nobuyuki Kosaka
Estimating the term…
A light transmission type vacuum separating window for separating a vacuum area into a plurality of vacuum areas through a film that transmits the light of a wavelength area such as an X-ray area and an infrared ray area. This vacuum separating window includes a thin film that transmits the light. The vacuum area is separated into the plurality of vacuum areas through this thin film. The light is any one of an X-ray, an infrared ray, a visible ray and an ultraviolet ray. A metal or an alloy that turns out a liquid in a range of temperature of a using environment may be provided between the thin film and the support member for supporting the thin film. This metal is preferably gallium. The alloy preferably contains gallium and, more preferably, consists of 75.5 weight % gallium and 24.5 weight % indium.
A light transmission type vacuum separating window comprising:
The light transmission type vacuum separating window comprising:
A soft X-ray transmitting window for taking out a soft X-ray with a pressure reduction area and an ultra high vacuum area partitioned in a vacuum chamber, said window comprising:
A light transmission type vacuum separating window comprising:
A light transmission type vacuum separating window for separating vacuum areas, comprising:
A light transmission type vacuum separating window for separating vacuum areas, comprising:
A light transmission type vacuum separating window for separating vacuum areas, comprising:
Dependencies are inferred from the claim text.
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Incoherent waves: x-rays
Arrangements for handling particles or ionising radiation, e.g. focusing or moderating: scattering devices; Absorbing devices; Ionising radiation…
Vessels; Containers; Shields associated therewith; Vacuum locks: windows permeable to X-rays, gamma-rays, or particles
Vessels; Containers; Shields associated therewith: windows
Term ended 14 Jan 2013 (estimated)
USPTO file history isn’t available for this patent, so only indexed dates are shown.
1. Field of the Invention
The present invention relates to a light transmission type vacuum separating window for separating a vacuum area into a plurality of vacuum areas through a film that transmits the light of a wavelength range such as an X-ray range and an infrared ray range and to a soft X-ray transmitting window as well.
2. Related Background Art
Other objects and advantages of the present invention will become apparent during the following discussion in conjunction with the accompanying drawings, in which:
FIG. 1 is a sectional view illustrating a soft X-ray transmitting window in one example of this invention;
FIG. 2 is a sectional view illustrating the principal portion of the soft X-ray transmitting window in another example of this invention;
Embodiments of the present invention will hereafter be described with reference to the drawings.
FIG. 1 is a sectional view illustrating a soft X-ray transmitting window in an example 1 of this invention. The same components as those in FIG. 24 are marked with the like symbols, and the explanations thereof will be omitted.
Referring to FIG. 1, the symbol A designates a pressure reduction area in a vacuum chamber, and B represents an ultra high vacuum area.