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US 5,317,492 AGranted
Rapid thermal heating apparatus and method
AssigneeApplied Materials, Inc.
InventorsChristian M. Gronet, James F. Gibbons
Life of this patent
Estimating the term…
Abstract
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
Claims6
A method of cooling a lamp base comprising
- (a) surrounding the lamp base with a low melt temperature alloy, and
- (b) maintaining the alloy in place with a ceramic potting compound, whereby when the lamp base temperature exceeds the melting temperature of the low melt temperature alloy, the low melt temperature alloy melts and transfers heat out of the lamp base.
Dependencies are inferred from the claim text.