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US 5,317,153 AGranted
Scanning probe microscope
AssigneeNikon Corporation
InventorsHiroyuki Matsushiro, Tetsuji Onuki, Masaya Miyazaki, Yasushi Fukutomi
Life of this patent
Estimating the term…
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AssigneeNikon Corporation
InventorsHiroyuki Matsushiro, Tetsuji Onuki, Masaya Miyazaki, Yasushi Fukutomi
Estimating the term…
A scanning probe microscope, capable of achieving a resolving power of atomic level, is provided with a probe microscope unit 5, 6, 17 for measuring a fine constitution of sample surface with a probe 5, and with an optical microscope unit 8, 10-16 for observing an optical image of sample, in which the probe microscope unit is encased in a box 9 shielded against external noises and electromagnetic waves. The box has a shape of a cone such as triangular cone, which is placed on a triangular surface plate.
A scanning probe microscope comprising:
A scanning probe microscope comprising:
A scanning probe microscope assembly comprising:
Dependencies are inferred from the claim text.
Drawings are temporarily unavailable. Open the PDF at USPTO
No related US applications are recorded in the indexed filing history.
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices: means for…
Methods or apparatus for measurement or analysis of nanostructures
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or…: details
With scanning probe: scanning probe structure
Term ended 31 Jul 2012 (estimated)
USPTO file history isn’t available for this patent, so only indexed dates are shown.
1. Field of the Invention
The present invention relates to a scanning probe microscope. More specifically, the invention relates to a fully vibration-isolated probe microscope.
2. Related Background Art
FIG. 1 is a perspective view (partly in section to show an internal structure) of a microscope in an embodiment according to the present invention;
FIG. 2 is a sectional view to schematically show a principle of the support structure of the microscope in the embodiment of FIG. 1;
FIG. 3 is a perspective view of a vibration isolating apparatus in an embodiment according to the present invention;
FIG. 1 shows an appearance and an internal structure of a scanning tunneling microscope (STM) in a preferred embodiment according to the present invention. FIG. 2 schematically shows a principle of a support structure. In FIGS. 1 and 2, a triangle surface plate 1 is mounted on a vibration isolating table for removing vibrations through the floor, and an xy-coarse movement stage 2 is disposed on an upper surface of the surface plate 1. A z-coarse movement stage 3 with a sample holder 4 attached thereto is mounted on the xy-coarse movement stage 2.
A tube scanner 6 holds a probe 5 for detecting a tunnel current. The tube scanner 6 comprises a cylindrical piezoelectric member and a plurality of electrodes disposed on the inside and the outside planes thereof. The tube scanner 6 is fixed through a disk support frame 71 to an inner column 7 disposed on the surface plate 1. The inner column 7 is of material and structure of high stiffness. Although the disk support frame 71 is formed of an opaque disk with through holes for light transmission in the present embodiment, the support frame 71 may be formed of light transmitting glass or plastics.
An optical microscope unit 10 is mounted on the upper portion of an outside box 9. The optical microscope unit 10 is composed of an objective lens 8, an illumination light source 11, an illumination lens 12, a half mirror 13, an imaging lens 14, a television camera 15, and a focusing drive unit 16.