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US 5,317,069 AGranted
Maleimide-alt-silylstyrene copolymer
AssigneeNational Science Council
InventorsWen-Yen Chiang, Jin-Yuh Lu
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Abstract
The present invention discloses a maleimide-alt-trialkylsilylstyrene copolymer having the formula: ##STR1## wherein: R.sub.1 is H or methyl; R.sub.2 is C.sub.1 -C.sub.3 alkyl; and n is an integer such that the copolymer has a weight average molecular weight of 25,000-120,000. The copolymer of formula (I) is useful in the preparation of a photoresist composition. A process for preparing the copolymer of formula (I) is also disclosed.
Claims4
A maleimide-alt-trialkylsilylstyrene copolymer having repeating units of:
- ##STR7## wherein:
- R.sub.1 is H or methyl group;
- R.sub.2 is C.sub.1 -C.sub.3 alkyl group;
- and
- said copolymer has a weight average molecular weight of 25,000-120,000.
2 more elements
Dependencies are inferred from the claim text.