Apparatus for forming a thin film with a mist forming means
AssigneeSymetrix Corporation
InventorsLarry D. McMillan, Carlos A. Paz de Araujo, Tom L. Roberts
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Abstract
A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.
Claims8
Apparatus for forming a ferroelectric, super-conducting, or high dielectric constant thin film, said apparatus comprising:
- a source of a liquid, said liquid comprising one or more chemical elements;
- an enclosure;
- liquid introduction means for introducing liquid from said liquid source into said enclosure;
- rotating blade means in said enclosure for turning said liquid into a mist;
- and
- thin film forming means for utilizing said mist to form a ferroelectric, super-conducting, or high dielectric constant thin film comprising said one or more chemical elements, said thin film forming means including vacuum means for creating a vacuum to withdraw said mist from said enclosure and for drawing said liquid into said enclosure through said introduction means.
Dependencies are inferred from the claim text.