Fiber optic chemical sensor

A sensor for detecting the presence of a particular chemical or biological species in a zone to be monitored comprising a body of semiconductor material having a light-emitting element and a light-detecting element accommodated at a surface of the body, an optical fiber on the body surface in optically coupled relation to the elements at respective opposite ends of the optical fiber for normally transmitting light from the light-emitting element to the light-detecting element to provide an electrical signal corresponding to the light, the optical fiber having a core formed on the body in adherent relation to the body surface to define a convoluted light path between the elements and having a cladding material disposed around at least a portion of the core in adherent relation to the core and body surface, the cladding material being selected to react with a particular chemical or biological species to produce measurable change in transmission of light through the optical fiber for regulating the signal to be representative of the presence of the species, and an additional light-detecting element accommodated by the body and having an additional optical fiber formed in situ on the body in optically coupled relation to the light-emitting element and the additional light-detecting element to transmit light to the additional light-detecting element for providing a comparison electrical signal representative of the light output of the light-emitting element.

A chemically or biologically responsive sensor comprising a body of semiconductor material, a light-emitting element embodying a gallium arsenide P-N junction incorporated in the body spaced from a central portion of a surface of the body, a first light-detecting element incorporated in the central portion of the surface of the body, a first optical fiber formed in situ on the body surface defining a spiral light-transmitting path around the central portion of the body surface extending between the light-emitting element and the first light-detecting element, the first optical fiber embodying a core for transmitting light to the first detecting element to provide a first electrical signal and having a reactive layer around at least a portion of the core which reacts with a predetermined chemical or biological species to produce measurable changes in transmission of light through the first optical fiber when the reactive layer is contacted by the predetermined species for regulating the electrical signal to be representative of the presence of the species, a second light-detecting element incorporated in the body surface outside the spiral path, and a second optical fiber formed in situ on the body surface between the light emitting element and the second detecting element transmitting light to the second light-detecting element to provide a second electrical signal representative of the light-emitting element.

A method for forming an optical fiber sensor comprising the steps of providing a body of semiconductor material incorporating a light-emitting element, a light-detecting element and an additional light-detecting element, depositing a first layer of a coating material of a first index of refraction on a surface of the body between the light-emitting element and each of the light-detecting elements in adherent relation to the body, depositing a second layer of a light-transmitting material of a refractive index relatively greater than that of the first layer coating material on said coating material in adherent relation to the coating material, selectively removing at least a portion of at least the second layer material to define a narrow strip of the light-transmitting material extending along a convoluted path between both the light-emitting element and light-detecting element and the light-emitting element and the additional light-detecting element, and depositing a layer of cladding material of relatively lower index of refraction than that of the light-transmitting second layer material over and around at least a portion of the narrow strip in adherent relation to the body surface and the strip to form optical fibers optically coupled to the elements to transmit light from the light-emitting element to the light-detecting element to provide an electric signal corresponding to the transmitted light, the cladding material being selected to react with a particular chemical or biological species to produce measurable change in the transmitted light so that the electrical signal indicates the presence of the species, and to transmit light from the light-emitting element to the additional light-detecting element to provide an additional electric signal representative of the light output from the light-emitting element.