Thermal control system for a semi-conductor burn-in
AssigneeEJ Systems, Inc.
InventorElmer R. Jones
Life of this patent
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Abstract
A temperature controller to accurately control the temperature of a device under test (DUT) a heat exchanger in heat exchange relationship with the DUT. A temperature sensor is received within the heat exchange device and thermally isolated therefrom. This temperature sensor measures the temperature of the DUT. A second temperature sensor is received within the heat exchange device and measures the temperature of the heat exchange device. The temperature of the DUT is based on temperature readings from both the sensors.
Claims5
A temperature controller adapted to releasably engage a burn-in tray to place the temperature controller in communication with a device under test (DUT), the temperature controller including:
- a heat exchange device adapted to be placed in heat exchange relationship with the DUT;
- a DUT temperature sensor received within the heat exchange device and thermally isolated from the heat exchange device to measure the temperature of the DUT;
- a temperature sensor received within the heat exchange device to measure the temperature of the heat exchange device;
- means to transfer thermal energy into the heat-exchange device;
- and
- means to place the heat exchange device in heat transfer relationship with the DUT.
Dependencies are inferred from the claim text.