A substrate voltage generator in a semiconductor device having a voltage down converter for stepping down an externally applied power supply voltage to a prescribed voltage and generating an internal stepped-down power supply voltage, said semiconductor device being formed on a semiconductor substrate, said substrate voltage generator comprising:
- first substrate voltage applying means operating with said externally applied power supply voltage as an operation power supply voltage for applying a first bias voltage to said semiconductor substrate;
- second substrate voltage applying means operating with said internal stepped-down power supply voltage as an operation power supply voltage for applying a second bias voltage to said semiconductor substrate;
- substrate potential detecting means for detecting a potential of said semiconductor substrate;
- first selective activation means responsive to an output of said substrate potential detecting means for selectively activating said first and second substrate voltage applying means;
- stable state detecting means for detecting whether said internal stepped-down voltage is in a stable state or not, and
- second selective activation means responsive to an output of said stable state detecting means for selectively activating said first and second substrate voltage applying means.