Photoelectric conversion apparatus for detecting movement of object with spatial filter electrode
AssigneeYamatake-Honeywell Co., Ltd.
InventorsAkira Kobayashi, Takeshi Kawai, Hiroshi Sasaki
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Abstract
A photoelectric conversion apparatus includes a pair of opposite electrodes, and an amorphous silicon film. The amorphous silicon film is sandwiched between the pair of opposite electrodes and serves to perform photoelectric conversion of light including light from a target object. At least one of the pair of opposite electrodes is divided into a set of pattern electrodes respectively connected to the amorphous silicon film in electrically positive and negative directions so as to form a spatial filter electrode. The respective pattern electrodes respectively connected in the positive and negative directions are irregularly arranged on the amorphous silicon film.
Claims4
A photoelectric conversion apparatus for performing photoelectric conversion of light from a target object to detect movement of said target object, comprising:
- a pair of opposite electrodes, at least one of said opposite electrodes being divided into a set of pattern electrodes, said set of pattern electrodes comprising first and second comb electrodes combined to oppose each other at a predetermined pitch and having comb teeth connected to a plurality of cell electrodes, all of said cell electrodes being formed in matrix form;
- and
- an amorphous silicon film sandwiched between said pair of opposite electrodes and connected to said set of pattern electrodes in electrically positive and negative directions so as to form a spatial filter electrode, said cell electrodes of each of said pattern electrodes being irregularly arranged on said amorphous silicon film.
Dependencies are inferred from the claim text.