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US 5,314,988 AGranted
Thermally stable highly sensitive resists and the like
AssigneeAcademy of Applied Science
InventorJames C. W. Chien
Life of this patent
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AssigneeAcademy of Applied Science
InventorJames C. W. Chien
Estimating the term…
A process for forming a polymer (and the polymer formed thereby) for passivation, resist and bonding uses, for example, that is thermally stable at relatively high temperatures in excess of 400.degree. C., but is sensitive to electromagnetic radiation. The process includes forming a heteroatom ring polymer that includes a chain formed of a large number of closed aromatic rings such as polyimide groups. According to the present teaching, intervening moieties, (that is, chemical groupings) in the form of open ring precursors of the aromatic rings, such as polyamic acid groups are introduced between the successive closed aromatic rings, which destroy and/or delimit the colinear character and the coplanar character typical of the successive aromatic rings, thus rendering the aromatic rings sensitive to structural change by electromagnetic radiation exposure, and soluble in common organic solvents, but with the exposed HRP insoluble in resist developers.
An HRP polymer radiation-sensitive resist having a repeating unit of the formula --Ar--[Z--Ar'--Z]--, wherein Ar is selected from the group consisting of ##STR20## and Ar' represents ##STR21## in which each X is individually selected from the group consisting of --O--, --S--, --SO--, SO.sub.2, --C--, --C.sub.n F.sub.2n -- and --C.sub.n F.sub.2n+1 --, and a is a small integer between one and three, and Z is selected from the group consisting of closed ring imide groups combined in the polymer chain as about 75 to 98 percent of the same with the remaining smaller percentage of their corresponding open-ring precursor groups, such that the said polymer chain is converted from properties of radiation inertness, to properties of sensitivity to radiation so as to serve as a radiation resist, enabling the closing of the open rings of the said smaller percentage of open-ring precursor in response to radiation directed thereupon.
An HRP polymer radiation-sensitive resist comprising (1) aromatic chain groups consisting of polyimide groups in which the constituent amide and carboxylic units have been connected through condensation of water to provide about 75-98 percent closed-ring groups, combined with (2) a much smaller group of intervening corresponding precursors such as polyamic acid groups in which the constituent amide and carboxylic groups are unconnected or open-ringed and wherein, upon exposure to radiation, the resulting water condensation renders the said precursors closed-ring, as by connecting said amide and carboxylic units, thus causing the HRP to serve a resist function, with the radiation-exposed polymer insoluble to resist developers, selected from the group consisting of DMP and i-propanol, and highly stable at temperatures of about 450.degree. C. and above.
A method of rendering radiation sensitive an aromatic chain selected from the closed ring group consisting of imide groups which are normally radiation inert so as to serve as a radiation resist, that comprises, combining the closed ring group in a polymer chain with their corresponding open-ring precursor groups;
Dependencies are inferred from the claim text.