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US 5,314,978 AGranted
Copolymer of sulfur dioxide and nuclear-substituted trialkylgermylstyrene
AssigneeKumho Petrochemical
InventorsSeong-Ju Kim, Ji-Hong Kim, Seong-Geun Jang, Dae-Youp Lee
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Abstract
Copolymers comprising 1-50 mole % of sulfur dioxide and 50-99 mole % of trialkylgermylstyrene, having a weight average molecular weight of 500-10,000,000 and exhibiting a high sensitivity to light, electron beam, and X-ray, as well as having an excellent anti-dry etching resistance, and their application as a positive resisting material.
Claims6
A copolymer of sulfur dioxide and trialkylgermylstyrene, which comprises:
- (a) about 1-50 mole % of a sulfur dioxide unit;
- and
- (b) about 50-99 mole % of a trialkylgermylstyrene unit;
- wherein the copolymer has a weight average molecular weight of 500-10,000,000 and is represented by units having the formula (1):
- ##STR4## wherein R.sup.1 is CH.sub.3, C.sub.2 H.sub.5, C.sub.3 H.sub.7 ;
- and k is a molar ratio.
3 more elements
A copolymer of sulfur dioxide and trialkylgermylstyrene, which comprises:
- (a) about 1-50 mole % of a sulfur dioxide unit;
- and
- (b) about 55-99 mole % of a mixture comprising
- (I) at least one unit of an aliphatic olefinic hydrocarbon or a unit of a vinyl compound having an aromatic ring or a mixture thereof, and
- (II) a trialkylgermylstyrene unit;
- wherein the copolymer units are represented by formulas (2), (3), and (4) ##STR5## wherein R.sup.1 is CH.sup.3, C.sub.2 H.sub.5 ;
- or C.sub.3 H.sub.7 ;
- R.sup.2 is H, OC(CH.sub.3).sub.3, C(CH.sub.3).sub.3 or CH.sub.3' ;
- M is an aliphatic olefinic hydrocarbon unit, and k, m, and l are each a molar ratio, and p and q are each an integer of 1-10.
6 more elements
Dependencies are inferred from the claim text.