Method for forming an antifuse element with electrical or optical programming
AssigneeInternational Business Machines Corporation
InventorsDominic J. Schepis, Kris V. Srikrishnan, Seshardi Subbanna, Manu J. Tijwani
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Abstract
A programmable antifuse element comprising adjacent bodies of germanium and aluminum or aluminum alloy form forming a low resistance connection of good mechanical and thermal properties when heated to a temperature where alloying of the aluminum and germanium occurs. Heating for the purpose of programming the antifuse element can be done by electrical resistance heating in the germanium, which may be doped to achieve a desired resistance value, or by laser irradiation. Due to the high resistance of intrinsic or lightly doped germanium, a resistance change ratio of greater than 10,000:1 is achieved.
Claims10
A method of fabricating a programmable connection including the steps of
- depositing a body containing aluminum,
- depositing a body of germanium adjacent said body of aluminum, and
- selectively heating at least a portion of each of said bodies of germanium and aluminum to a temperature in excess of approximately 420.degree. C. to cause diffusion of said portion of each of said bodies of germanium and aluminum.
A method of fabricating a programmable connection including the steps of
- depositing a body containing aluminum,
- depositing a body of germanium adjacent said body of aluminum,
- doping said body of germanium to reach a resistance value range suitable for electrical resistance heating, and
- selectively alloying at least a portion of said body of germanium with at least a portion of said body containing aluminum by electrical resistance heating of said body of germanium.
Dependencies are inferred from the claim text.