Positive-working radiation sensitive mixture comprising sulfonic acid esters of 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine, and recording material containing these esters
AssigneeHoechst Aktiengesellschaft
InventorsHorst Roeschert, Georg Pawlowski, Juergen Fuchs
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Abstract
A 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine esterified with two or three arylsulfonic acids or heteroarylsulfonic acids is useful to prepare a positive-working radiation-sensitive mixture which is distinguished by a high resolution and a high sensitivity over a wide spectral range. It also shows high thermal stability and does not form corrosive photolysis products on exposure. A radiation-sensitive recording material which is produced from these esters is suitable for producing photoresists, electronic components, printing plates or for chemical milling.
Claims20
A positive-working radiation-sensitive mixture comprising
- a) a 2,4,6-tris-(2-hydroxyethoxy)-[1,3,5]triazine esterified with two or three acids selected from the group consisting of arylsulfonic acids, heteroarylsulfonic acids, and mixtures thereof, which generates a strong acid under the action of actinic radiation,
- b) at least one compound having at least one acid-cleavable C--O--C or C--O--Si bond and
- c) at least one polymeric binder which is insoluble in water and soluble or at least swellable in aqueous alkaline solutions.
Dependencies are inferred from the claim text.