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US 5,314,603 AGranted
Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber
AssigneeTokyo Electron Yamanashi Limited
InventorsKazuhiko Sugiyama, Masafumi Shimizu, Yukio Naito, Eiichi Nishimura, Kouichi Oshima
Life of this patent
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Abstract
A plasma processing apparatus has a process chamber and a pair of electrodes provided in the process chamber to oppose each other. An RF power supply outputs an RF power to be supplied to at least one of the pair of electrodes in the process chamber. A power detector detects an actual RF power to be applied to one of the electrodes in the process chamber. A controller controls the RF power output from the RF power supply to a predetermined value in accordance with the actual RF power detected by the power detector.
Claims21
A plasma processing apparatus, comprising:
- plasma processing means including a processing chamber and upper and lower electrodes which are located in the processing chamber and which face each other;
- an RF power source, located away from the plasma processing means by a predetermined distance, for outputting RF power and applying the RF power to the lower electrode located in the processing chamber through a cable transmission line of a predetermined length;
- impedance matching means, inserted at an intermediate point of the cable transmission line, for impedance matching;
- power detecting means, provided at that end of the cable transmission line which is located in the vicinity of the plasma processing means, for detecting a value of the RF power actually applied to the lower electrode,
- said power detecting means including:
- (a) a current detector comprising a current transformer coupled to the end of the cable transmission line that is located in the vicinity of the plasma processing means, a voltage transformer coupled to the current transformer, and a resistor connected to the voltage transformer, said current detector detecting a current component of the RF power actually applied to the lower electrode by means of the resistor;
- (b) a voltage detector comprising a capacitor having a first end coupled to the end of the cable transmission line that is located in the vicinity of the plasma processing chamber and a resistor circuit coupled to a second end of the capacitor, said voltage detector detecting a voltage component of the RF power actually applied to the lower electrode by means of the resistor circuit;
- and
- (c) an operation section for multiplying the current component detected by the current detector by the voltage component detected by the voltage detector, for extracting an effective value component of the RF power actually applied to the lower electrode from results of multiplication, and for outputting the effective value component at predetermined intervals;
- and
- control means for controlling the RF power output from the RF power source so that the RF power output has a desirable value in accordance with the effective value component extracted from the operation section of the power detecting means, whereby the RF power output is compensated for power loss occurring at least in the cable transmission line and the impedance matching means.
8 more elements
A plasma processing apparatus, comprising:
- plasma processing means including a processing chamber and upper and lower electrodes which are located in the processing chamber and which face each other;
- an RF power source, located away from the plasma processing means by a predetermined distance, for outputting RF power and applying the RF power to the lower electrode located in the processing chamber through a cable transmission line of a predetermined length;
- impedance matching means, inserted at an intermediate point of the cable transmission line, for impedance matching;
- power detecting means, provided at that end of the cable transmission line which is located in the vicinity of the plasma processing means, for detecting a value of the RF power actually applied to the lower electrode,
- said power detecting means including:
- (a) a current detector comprising a current transformer coupled to the end of the cable transmission line that is located in the vicinity of the plasma processing means, a voltage transformer coupled to the current transformer, and a resistor connected to the voltage transformer, said current detector detecting a current component of the RF power actually applied to the lower electrode by means of the resistor;
- (b) a voltage detector comprising a capacitor having a first end coupled to the end of the cable transmission line that is in the vicinity of the plasma processing means, and a resistor circuit coupled to a second end of the capacitor, said voltage detector detecting a voltage component of the RF power actually applied to the lower electrode by means of the resistor circuit;
- and
- (c) an operation section for multiplying the current component detected by the current detector by the voltage component detected by the voltage detector, for extracting an effective value component of the RF power actually applied to the lower electrode from results of multiplication, and for outputting the effective value component at predetermined intervals;
- power control means for controlling the RF power output from the RF power source so that the RF power output has a desirable value in accordance with the effective value component extracted from the operation section of the power detecting means, whereby the RF power output is compensated for power loss occurring at least in the cable transmission line and the impedance matching means;
- and
- phase control means for monitoring a phase of the RF power passing through the impedance matching means and for controlling a phase of the RF power output from the RF power source to have a value falling within a desirable range.
9 more elements
A plasma processing apparatus, comprising:
- plasma processing means including a processing chamber and upper and lower electrodes which are located in the processing chamber and which face each other;
- an RF power source, located away from the plasma processing means by a predetermined distance, for outputting RF power and applying the RF power to the lower electrode located in the processing chamber through a cable transmission line of a predetermined length;
- impedance matching means, inserted at an intermediate point of the cable transmission line, for impedance matching;
- power detecting means, provided at that end of the cable transmission line which is located in the vicinity of the plasma processing means, for detecting a value of the RF power actually applied to the lower electrode,
- said power detecting means including:
- (a) a current detector comprising a current transformer coupled to the end of the cable transmission line that is located in the vicinity of the plasma processing means and a resistor connected to the voltage transformer, said current detector detecting a current component of the RF power actually applied to the upper electrode by means of the resistor;
- (b) a voltage detector comprising a capacitor having a first end coupled to the end of the cable transmission line that is in the vicinity of the plasma processing means, and a resistor circuit coupled to a second end of the capacitor, said voltage detector detecting a voltage component of the RF power actually applied to the lower electrode by means of the resistor circuit;
- and
- (c) an operation section for multiplying the current component detected by the current detector by the voltage component detected by the voltage detector, for extracting an effective value component of the RF power actually applied to the upper electrode from results of multiplication, and for outputting the effective value component at predetermined timings;
- and
- control means for controlling the RF power output from the RF power source so that the RF power output has a desirable value in accordance with the effective value component extracted from the operation section of the power detecting means whereby the RF power output compensated for power loss least in the cable transmission line and the impedance matching means.
8 more elements
A plasma processing apparatus, comprising:
- plasma processing means including a processing chamber and upper and lower electrodes which are located in the processing chamber and which face each other;
- an RF power source, located away from the plasma processing means by a predetermined distance, for outputting RF power and applying the RF power to the lower electrode located in the processing chamber through a cable transmission line of a predetermined length;
- impedance matching means, inserted at an intermediate point of the cable transmission line, for impedance matching;
- power detecting means, provided at that end of the cable transmission line which is located in the vicinity of the plasma processing means, for detecting a value of the RF power actually applied to the lower electrode,
- said power detecting means including:
- (a) a current detector comprising a current transformer coupled to the end of the cable transmission line that is located in the vicinity of the plasma processing means, a voltage transformer coupled to the current transformer, and a resistor connected to the voltage transformer, said current detector detecting a current component of the RF power actually applied to the lower electrode by means of the resistor;
- (b) a voltage detector comprising a capacitor having a first end coupled to the end of the cable transmission line that is in the vicinity of the plasma and a resistor circuit coupled to a second end of the capacitor, said voltage detector detecting a voltage component of the RF power actually applied to the upper electrode by means of the resistor circuit;
- and
- (c) an operation section for multiplying the current component detected by the current detector by the voltage component detected by the voltage detector, for extracting an effective value component of the RF power actually applied to the upper electrode from results of multiplication, and for outputting the effective value component at predetermined intervals;
- power control means for controlling the RF power output from the RF power source so that the RF power output has a desirable value in accordance with the effective value component extracted from the operation section of the power detecting means, whereby the RF power output is compensated for power loss at least in the cable transmission line and the impedance matching means;
- and
- phase control means for monitoring a phase of the RF power passing through the impedance matching means and for controlling a phase of the RF power output from the RF power source to have a value falling within a desirable range.
9 more elements
A plasma processing apparatus, comprising:
- plasma processing means including a processing chamber and upper and lower electrodes which are located in the processing chamber and which face each other;
- RF power supply means located away from the plasma processing means by a predetermined distance,
- said RF power supply means including:
- (a) an RF power source for outputting predetermined RF power;
- (b) power dividing means for dividing the RF power output from the RF power source into a first RF power and a second RF power which differ from each other by a predetermined phase, and for applying the first RF power and the second RF power to the lower and upper electrodes through first and second cable transmission lines, respectively;
- and
- (c) impedance matching means for performing impedance matching with respect to the first and second cable transmission lines;
- first and second power detecting means, respectively provided at those ends of the first and second cable transmission lines which are located in the vicinity of the plasma processing means, for detecting values of the first RF power and the second RF power that are actually applied to the lower and upper electrodes, respectively,
- each of said first and second power detecting means including:
- (a) a current detector comprising a current transformer coupled to the end of the corresponding one of the cable transmission lines that is in the vicinity of the plasma processing means, a voltage transformer coupled to the current transformer, and a resistor connected to the voltage transformer, said current detector detecting a current component of the RF power actually applied to a corresponding one of the upper and lower electrodes by means of the resistor;
- (b) a voltage detector comprising a capacitor having a first end coupled to the end of said corresponding one of the cable transmission lines that is in the vicinity of the plasma processing chamber and a resistor circuit coupled to a second end of the capacitor, said voltage detector detecting a voltage component of the RF power actually applied to said corresponding one of the upper and lower electrodes by means of the resistor circuit;
- and
- (c) an operation section for multiplying the current component detected by the current detector by the voltage component detected by the voltage detector, for extracting an effective value component of the RF power actually applied to said corresponding one of the upper and lower electrodes from results of multiplication, and for outputting the effective value component at predetermined intervals;
- and
- control means for controlling the RF power output from the RF power source so that the RF power output has a desirable value in accordance with the effective value components from the operation sections of the first and second power detecting means, whereby the RF power output is compensated for power loss occurring at least in the first and second cable transmission lines and the impedance matching means.
12 more elements
Dependencies are inferred from the claim text.