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US 5,314,570 AGranted
Process and apparatus for the production of diamond
AssigneeSumitomo Electric Industries, Ltd.
InventorsAkihiko Ikegaya, Naoji Fujimori
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AssigneeSumitomo Electric Industries, Ltd.
InventorsAkihiko Ikegaya, Naoji Fujimori
Estimating the term…
The present invention aims at improving a hot filament CVD method and apparatus capable of enlarging the diamond-forming area in relatively easy manner and utilizing effectively the capacity of a thermoelectron radiation material and provides a process and apparatus for producing diamond with excellent productivity as well as a compact size of apparatus, which can be applied to production on a commercial scale. The feature of the present invention consists in subjecting to decomposition, excitation and activation by a thermoelectron radiation material heated at a high temperature a raw material gas comprising at least one carbon source selected from the group consisting of hydrocarbons, hydrocarbons containing oxygens and/or nitrogens in the bonded groups, carbon oxides, halogenated hydrocarbons and solid carbon, hydrogen and optionally any one of inert gases of Group VIII elements, H.sub.2 O, O.sub.2 and F.sub.2 and depositing diamond on the surface of a substrate provided near the thermoelectron radiation material, characterized by surrounding the circumference of the thermoelectron radiation material by a cooling plate, providing a substrate to be deposited with diamond between the cooling plate and the thermoelectron radiation material with small gaps and controlling the surface temperature of the substrate facing the thermoelectron radiation material by the cooling plate and optionally a buffer material inserted between the cooling plate and the substrate, thereby depositing diamond.
A process for the production of diamond comprising subjecting to decomposition, excitation and activation, by a thermoelectron radiation material heated at a high temperature, a raw material gas comprising at least one carbon source selected from the group consisting of hydrocarbons, hydrocarbons containing oxygens and/or nitrogens in the bonded groups, carbon oxides, halogenated hydrocarbons and solid carbon, hydrogen and optionally any one of inert gases of Group VIII elements, H.sub.2 O, O.sub.2 and F.sub.2 and depositing diamond on the surface of a substrate provided near the thermoelectron radiation material, characterized by surrounding the circumference of the thermoelectron radiation material by a cooling plate, providing a substrate to be deposited with diamond between the cooling plate and the thermoelectron radiation material such that a small gap exists between the substrate and the thermoelectron radiation material and controlling the surface temperature of the substrate facing the thermoelectron radiation material by the cooling plate and optionally a buffer material inserted between the cooling plate and the substrate, thereby depositing diamond.
An apparatus for the production of diamond in which a raw material gas comprising at least one carbon source selected from the group consisting of hydrocarbons, hydrocarbons containing oxygens and/or nitrogens in the bonded groups, carbon oxides, halogenated hydrocarbons and solid carbon, hydrogen and optionally any one of the inert gases of Group VIII elements, H.sub.2 O, O.sub.2 and F.sub.2 is subjected to decomposition, excitation and activation by a thermoelectron radiation material heated at a high temperature and diamond is deposited on the surface of a substrate provided near the thermoelectron radiation material, characterized in that the circumference of the thermoelectron radiation material is surrounded by a cooling plate, a substrate to be deposited with diamond is provided between the cooling plate and the thermoelectron radiation material such that a small gap exists between the substrate and the thermoelectron radiation material and the surface temperature of the substrate facing the thermoelectron radiation material is controlled by the cooling plate and optionally a buffer material inserted between the cooling plate and the substrate, thereby depositing diamond.
Dependencies are inferred from the claim text.