Apparatus for plasma treatment of continuous material

An apparatus (1) for continuous treatment of a material (M) of continuous length with a low temperature plasma of a plasma gas under vacuum, the apparatus (1) comprising:

• a plasma treatment chamber (3) having a chamber wall (4) and, in the wall (4), an entrance zone (6) and an exit zone (7) for receiving and discharging the continuous material (M), respectively, and the treatment chamber (3) having at least one transition zone (16) spaced from the entrance and exit zones (6,7) and dividing the treatment chamber (3) into sub-chambers (17);
• evacuating means (49) operable to establish a vacuum in the sub-chambers (17);
• support means (9) for advancing the continuous material (M) along a path (8) through the sub-chambers (17) and also for maintaining a vacuum seal at the entrance and exit zones (6,7) and each transition zone (16) while the continuous material (M) passes therethrough;
• and plasma generating means (52) positioned within the treatment chamber (3) adjacent the path (8) for generating a low temperature plasma which contacts the continuous material (M) while it is advanced through the treatment chamber (3);
• characterized in that the support means (9) includes a backing roller (10) mounted adjacent the entrance and exit zones (6,7) for rotation on an axis (X) thereof, an entrance sealing roller (11) positioned adjacent the entrance zone (6), an exit sealing roller (13) positioned adjacent the exit zone (7) and a transition sealing roller (18) positioned at each transition zone (16), each sealing roller (11, 13, 18) being mounted for rotation on a respective axis thereof;
• the backing roller (10) forming with each sealing roller (11, 13, 18) a respective nip (12, 14, 19) at the entrance zone (6), exit zone (7) and each transition zone (16) through which the continuous material (M) passes into and out of the treatment chamber (3) and during advancement between adjacent sub-chambers (17), respectively.