Stiffness enhancer for movable stage assembly

A movable stage device comprising:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base in a first direction;
• a stiffener member which contacts said base and sad stage, and means for applying two forces in respective two directions, wherein one of said two forces urges the stiffener member against said stage, and the other of said two forces urges said stiffener member against a portion of said base.

A movable stage device comprising:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base in a first direction;
• a stiffener member which contacts said stage, and means for applying a force such that said stiffener member is urged into contact with said stage, and wherein said means for applying a force urges said stiffener member against an underside of said stage.

A movable stage device comprising:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base;
• a stiffener mounted on one of said base and said stage, said stiffener contacting the other of said base and said stage, and wherein said stiffener has a low stiffness in a direction orthogonal to a direction of movement of said stage, and a high stiffness in said direction of movement.

A scanning probe microscope including a movable stage, wherein a sample to be examined is mounted upon said stage, the apparatus comprising:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base;
• a stiffener which contacts portions of said stage, wherein said stiffener is extremely stiff in a direction of movement of the stage and has a low stiffness in a direction orthogonal to the direction of movement of said stage.

A scanning probe microscope including a movable stage assembly, said stage assembly including:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base;
• a stiffener which contacts both moving and nonmoving portions of said stage assembly, wherein the stiffener is extremely stiff in a direction of motion of the stage and has a low stiffness in a direction orthogonal to the direction of movement of said stage.

A method for examining a specimen utilizing a scanning probe microscope comprising:

• providing a specimen and a scanning probe microscope;
• mounting one of said scanning probe microscope and said specimen upon a movable stage assembly in which said stage assembly includes a stage which is mounted for relative movement with respect to a base;
• mounting a stiffener upon one of said stage and said base such that said stiffener contacts the other of said stage and said base;
• wherein the step of providing a stiffener includes providing a stiffener having a high stiffness in a direction of movement of said stage, and a relatively low stiffness in a direction orthogonal to said direction of movement of said stage, whereby said stiffener provides a mechanical coupling between said base and said stage.

A movable stage device comprising:

• a base;
• a stage supported on said base;
• means for moving said stage relative to said base in a first direction;
• a stiffener assembly including a mounting member, a stiffener member, and a means for applying a force, said mounting member mounted upon one of said stage and said base, said stiffener member contacting the other of said stage and said base, and said means for applying a force disposed between said stiffener member and said mounting member and urging said stiffener member against said other of said stage and said base;
• wherein said stiffener assembly has a stiffness significantly greater than a stiffness of said means for moving said sage in said first direction, and wherein said stiffener assembly also has a stiffness in a direction of movement of said stage which is significantly greater than a stiffness of said stiffener assembly in a direction orthogonal to said direction of movement.