US 5,314,164 AGranted

Pivotal diaphragm, flow control valve

AssigneeMKS Instruments, Inc.

InventorDaniel E. Smith

Life of this patent

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Abstract

An improved structure for pivotal fluid valves is disclosed wherein an elongated pivot arm is pivotally mounted through a flexible, resilient corrosion-resistant diaphragm that serves to support and balance the pivot arm and as a frictionless pivot support. One end of the pivot arm provides modulated restriction on an orifice inside the valve chamber to control the fluid flow. The opposite end of the pivot arm is linked to suitable motive power for actuating the pivot arm.

Claims31

Dependent claims

Valve assembly for regulating the flow of fluid, said assembly comprising:

(a) housing means defining a valve chamber having means for defining at least one orifice through which fluid flows;
(b) diaphragm means for defining at least a surface internal to said valve chamber and a surface external to said valve chamber;
and,
(c) fluid flow regulating means for controlling the flow of fluid through the orifice at a rate proportional to the strength of an external signal, said flow regulating means comprising:
(i) pivot means comprising a first control member projecting outwardly with respect to said valve chamber from the external surface of said diaphragm means, a second control member projecting inwardly with respect to said valve chamber from the internal surface of said diaphragm means along a longitudinal control member axis substantially perpendicular to the plane of said diaphragm means, said first and second control members defining a pivot axis lying in the plane of said diaphragm means;
(ii) plug means movable along a plug axis substantially perpendicular to said control member axis between a sealing position wherein said plug means sealingly engages said orifice so as to provide positive shut off and multiple non-sealing positions wherein said plug means at least partly disengages said orifice so as to provide fluid flow through said chamber;
(iii) means for connecting said second control member to said plug means;
and,
(iv) pivot support means for supporting said pivot means relative to said valve chamber so as to obtain restricted, substantially frictionless pivoting of said pivot means in order to move said plug means along said plug axis, said pivot support means comprising an elongated support member fastened to said first control member such that the longitudinal axis of said support member is substantially perpendicular to said control member axis and to said plug axis, and means for flexibly linking said elongated support member to said housing means.

6 more elements

A mass flow measurement and control system comprising:

(1) a valve assembly for regulating the flow of fluid through an orifice, said assembly comprising:
(a) housing means defining a valve chamber having means for defining at least one orifice through which fluid flows;
(b) diaphragm means for defining at least a surface internal to said valve chamber and a surface external to said valve chamber;
and,
(c) fluid flow regulating means for controlling the flow of fluid through the orifice at a rate proportional to the strength of an external signal, said flow regulating means comprising:
(i) pivot means comprising a first control member projecting outwardly with respect to said valve chamber from the external surface of said diaphragm means, a second control member projecting inwardly with respect to said valve chamber from the internal surface of said diaphragm means along a longitudinal control member axis substantially perpendicular to the plane of said diaphragm means, said first and second control members defining a pivot axis lying in the plane of said diaphragm means;
(ii) plug means movable along a plug axis substantially perpendicular to said control member axis between a sealing position wherein said plug means sealingly engages said orifice so as to provide positive shut off and multiple non-sealing positions wherein said plug means at least partly disengages said orifice so as to provide fluid flow through said chamber;
(iii) means for connecting said second control member to said plug means;
and,
(iv) pivot support means for supporting said pivot means relative to said valve chamber so as to obtain restricted, substantially frictionless pivoting of said pivot means in order to move said plug means along said plug axis, said pivot support means comprising an elongated support member fastened to said first control member such that the longitudinal axis of said support member is substantially perpendicular to said control member axis and to said plug axis, and means for flexibly linking said elongated support member to said housing means;
(2) actuating means for applying a substantially continuous range of forces to said pivot means so as to regulate the flow rate of fluid through said orifice as a function of a control signal;
and
(3) means for measuring the flow of fluid into said valve and for generating said control signal as a function of said measured flow.

10 more elements

In a valve apparatus for regulating fluid flow comprising a housing defining a valve chamber, inlet and outlet fluid orifices between the valve chamber and the exterior of said housing, and an aperture in a wall of said housing, the improvement comprising:

(a) an annular lip in said wall of said housing adjacent said aperture;
(b) diaphragm means adapted to seat on said annular lip and thereby sealably cover said aperture and an annular member adapted to seat on said diaphragm means so as to sandwich said diaphragm means between said annular lip and one edge of said annular member;
and
(c) fluid flow regulating means comprising:
(i) pivot means comprising a first control member projecting outwardly with respect to said valve chamber from the external surface of said diaphragm means, a second control member projecting inwardly with respect to said valve chamber from the internal surface of said diaphragm means along a longitudinal control member axis substantially perpendicular to the plane of said diaphragm means, said first and second control members defining a pivot axis lying in the plane of said diaphragm means;
(ii) plug means movable along a plug axis substantially perpendicular to said control member axis between a sealing position wherein said plug means sealingly engages at least one of said fluid orifices so as to provide positive shut off and multiple non-sealing positions wherein said plug means at least partly disengages the fluid orifice so as to provide fluid flow through said chamber;
(iii) means for connecting said second control member to said plug means;
and,
(iv) pivot support means for supporting said pivot means relative to said valve chamber, said pivot support means comprising an longitudinal support member connected to said first control member such that the longitudinal axis of said support member is substantially perpendicular to said control member axis and to said plug axis, and means for flexibly linking said elongated support member to said housing means.

6 more elements

Dependencies are inferred from the claim text.

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Abstract

Valve assembly for regulating the flow of fluid, said assembly comprising:

(a) housing means defining a valve chamber having means for defining at least one orifice through which fluid flows;
(b) diaphragm means for defining at least a surface internal to said valve chamber and a surface external to said valve chamber;
and,
(c) fluid flow regulating means for controlling the flow of fluid through the orifice at a rate proportional to the strength of an external signal, said flow regulating means comprising:
(i) pivot means comprising a first control member projecting outwardly with respect to said valve chamber from the external surface of said diaphragm means, a second control member projecting inwardly with respect to said valve chamber from the internal surface of said diaphragm means along a longitudinal control member axis substantially perpendicular to the plane of said diaphragm means, said first and second control members defining a pivot axis lying in the plane of said diaphragm means;
(ii) plug means movable along a plug axis substantially perpendicular to said control member axis between a sealing position wherein said plug means sealingly engages said orifice so as to provide positive shut off and multiple non-sealing positions wherein said plug means at least partly disengages said orifice so as to provide fluid flow through said chamber;
(iii) means for connecting said second control member to said plug means;
and,
(iv) pivot support means for supporting said pivot means relative to said valve chamber so as to obtain restricted, substantially frictionless pivoting of said pivot means in order to move said plug means along said plug axis, said pivot support means comprising an elongated support member fastened to said first control member such that the longitudinal axis of said support member is substantially perpendicular to said control member axis and to said plug axis, and means for flexibly linking said elongated support member to said housing means.

6 more elements